應用差分干涉對比術於微米級透明材質的高度量測方法

Height measurement for micro-transparent object by Differential Interference Contrast

劉濬嘉(Chun-Chia Liu)

指導教授 ： 林士傑

國立清華大學/工學院/動力機械工程學系/碩士(2010年)

摘要

由於光電產業的開發傾向於使用透明材質為基板，如軟性顯示器(Flexible Plastic Display)、透明導電薄膜等。而目前針對透明材質量測的技術仍在研究階段，故如何開發一透明材質的高度量測，格外重要。

本研究針對差分干涉對比(Differential Interference Contrast, DIC)技術於透明材質的重建方法作修正。首先，我們模擬光在DIC中穿過待測物得到的微分影像；修正M. R. Arnison等人提出的Hilbert轉換(Hilbert Transform)，成功重建在不同形貌的物件，這方法可應用在邊緣形貌為緩坡、陡峭或步階的待測物。另外建立一穿透式DIC實驗架構，搭配不同波長光源作驗證並分析結果。藉由修正型傅立葉相位積分方法，可精確地重建邊緣為緩坡的微米級透明材質物件。

關鍵字

差分干涉對比術 ； 修正型傅立葉相位積分法 ； 雙波長相移干涉術 ； 定量化相位還原 ； 渥拉斯頓稜鏡

並列摘要

Due to the development of Opto-electronic industry such as flexible display, Indium Tin Oxide (ITO), lots of substrate trend to use transparent materials. In recent years, the technique of measure transparent materials is still in investigation. It is the most important to measure the height of transparent
materials.

This study designed one integration method to improve the Differential Interference Contrast (DIC) microscopy system for transparent materials. Firstable, we can get the differential image when light pass through virtual model in DIC. The Hilbert Transform theory presented by M. R. Arnison on 2000 [34] was corrected and reconstructed in different topography by author successfully. This modified method can be applied for the different types edges, such as gentle ascent、steep slope、and step. We set the experiment of transmitted DIC. The author use different wavelength in the test of DIC and compare the results. Through the Modified Fourier Phase Integration (MFPI),
the micro-level gentle ascent edge on transparent materials can be reconstructed precisely.

並列關鍵字

Differential Interference Contrast ； Modified Fourier Phase Integration ； Two-Wavelength Phase-Shifting Interferometry ； quantitative phase restoration ； Wollaston prism

參考文獻

[27] 余昇剛,“應用差分干涉對比術於透明材質的三維形貌量測方法,” 國立清華大學動力機械工程研究所碩士論文, (2009/06)

[7] 余逸群,“利用光學讀寫頭實現雙波長顯微干涉術,” 國立中興大學機械工程研究所碩士論文, (2006/07)

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