Characterization of Tunable Narrow Localized Surface Plasmon Polariton Mode with T-Shaped Array Structure

在T型結構上可調變的及超窄侷域性表面電漿共振模態特性分析

張子倉(Zi-Chang Chang)

指導教授 ： 吳孟奇 ； 施閔雄

國立清華大學/電機資訊學院/電子工程研究所/碩士(2009年)

摘要

摘要

近年來，表面電漿在奈米光學領域裡是個相當熱門的題目。此篇論文主要研究紅外線波段的入射光與具有特定結構的金屬表面之間的耦合機制。
具有T型陣列的結構，不僅僅是利用存在銀與二氧化矽表面之間的電漿共振，還藉由中間的銀達到更好的侷域表面電漿特性。
由於此特別的結構，在此篇論文裡我們也會介紹奈米圖形產生系統裡面的對準系統。而此對準系統的誤差可以小於50nm。
此結構的所有特性也會藉由RCWA模擬方式表達出來。利用此結構在實驗方面我們也成功的得到可調變式的侷域表面電漿模態。

關鍵字

Surface Plasmon

並列摘要

Abstract

In recent years, surface plasmon is very popular topics in the nano optics. The thesis is major to study the feature which the coupling of metal film with specific periodic structure and incident light with infrared wavelength.
The structure with T-shaped array not only employs the coupling of two SPP modes at interfaces Ag/SiO2 but also use the silver bridge. Depend on the silver bridge we can get better characteristic for localizing surface plasmon polariton.
Because of the specific structures we will also demonstrate the alignment technique in nanometer pattern generation system. The accuracy of alignment can be smaller than 50nm.
In simulation the other characteristics also been developed by using the theory of RCWA. Finally in the experiment we successfully obtain a tunable narrow localized surface plasmon (LSPP) mode by using the structure.

並列關鍵字

表面電漿

參考文獻

[1] R. W. Wood, “On a Remarkable Case of Uneven Distribution of Light in a Diffraction Grating Spectrum,” Proc. Phys. Soc. London. 18, 269-275 (1902)

[2] J. C. Maxwell Garnett, “Colours in Metal Glasses and in Metallic Films,” Philos. Trans. R. Soc. London. 203, 385-420 (1904)

[3] R.H. Ritchie, “Plasma Losses by Fast Electrons in Thin Films,” Phys. Rev. 106, 874-881 (1957)

[4] T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, P. A. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature. 391, 667-669 (1998)

[5] U. SchrÖter and D. Heitmann, “Grating couplers for surface plasmons excited on thin metal films in the Kretschmann-Raether configuration,” Phys. Rev. Lett. 60, 4992-4999 (1999)