生胚密度差異所引發之燒結曲率與應力分析

Effects of Green Density on Camber and Stress Development during Firing Low-temperature Cofired Ceramic System

江孟儒

指導教授 ： 簡朝和

國立清華大學/工學院/材料科學工程學系/碩士(2010年)

摘要

本研究主要探討硼矽玻璃(BSG)+氧化鋁(Al2O3)系統製作成的低、高生胚密度試片，於共燒時產生的曲率(camber)與應力(stress)。利用熱機械分析儀量測兩種試片在不同升溫速率下的收縮差異，以及單軸向黏度(uniaxial viscosity)，並以同步照相方式觀察試片共燒時的曲率變化。將收縮率差值和曲率變化代入黏彈性模型(visco-elastic model)，皆可計算不匹配應力，且兩者計算出的結果相近。由於不匹配應力遠小於燒結驅動力，共燒結構仍可達到高度緻密，共燒後的試片亦未發現任何缺陷。

關鍵字

低溫共燒陶瓷 ； 曲率 ； 燒結應力

參考文獻

[2] M. Gongora-Rubio, L. M. Solá-Laguna, P. J. Moffett and J. J. Santiago-Avilés, “The Utilization of Low Temperature Co-fired Ceramics (LTCC-ML) Technology for Meso-Scale EMS, A Simple Thermistor Based Flow Sensor,” Sensor. Actuat. A, 73 [3] 5–221 (1999).

[3] J. H. Jean, C. R. Chang and Z. C. Chen, “Effect of Densification Mismatch on Camber Development during Cofiring Ni-Based Multilayer Ceramic Capacitors,” J. Am. Ceram. Soc., 80 [9] 2401-2406 (1997).

[4] J. H. Jean and C. R. Chang, “Camber Development during Cofiring Ag-Based Low-Dielectric-Constant Ceramic Package,” J. Mater. Res., 12 [10] 2743-2750 (1997).

[5] J. C. Chang and J. H. Jean, “Camber Development During the Cofiring of Bi-Layer Glass-Based Dielectric Laminate,” J. Am. Ceram. Soc., 88 [5] 1165–1170 (2005).

[6] R. T. Hsu and J. H. Jean, “Key Factors Controlling Camber Behavior During the Cofiring of Bi-Layer Ceramic Dielectric Laminates,” J. Am. Ceram. Soc., 88 [9] 2429–2434 (2005).