應用萃思法於製程可靠性測試之改善

Applying TRIZ on Improvement of Process Reliability Test

陳建福(CHEN, CHIEN FU)

指導教授 ： 黃雪玲

國立清華大學/工學院/工業工程與工程管理學系碩士在職專班/碩士(2013年)

https://doi.org/10.6843/NTHU.2013.00436

摘要

製程可靠性測試由於測試機台產能有限，要達成眾多產品之測試時效性是非常困難的，因此產生了劇烈的需求衝突。本論文之研究目的為 - 在維持應有的測試品質下，改善製程可靠性測試方法，使測試時間縮短，提昇相關測試結果的回饋速度。
本論文整合順向與逆向思考法於萃思分析的解題過程中，一方面以順向思考的解題方式，用「功能屬性分析」建構功能屬性系統，利用「因果衝突鏈分析」找出系統的功能衝突點後，分析衝突參數，配合「矛盾矩陣與發明原則」找出對應之觸發解並聯想解決方案；另一方面，運用「工程系統演化趨勢」發現提昇測試績效之發展方向，以「理想最終結果分析」訂出目標，配合「修剪」法，以逆向思考的解題步驟，從系統最終目標往回一步步削減其理想性來進行分析；最後用腦力激盪和「功能導向搜尋」修正與調整找出解決方案的適應性，來找出合適的解決方案。
本論文是實際整合運用順向與逆向思考法於萃思解題流程中之先行者，並且是首先將其運用於製程可靠性測試領域的改善，其結果證實我們能夠用此方式快速並且有效地找出最終解決方案。經由運用萃思方法分析，獲得對於此製程可靠性測試改善的解決方案為 - 以「晶圓層次之等溫電致遷移測試」來取代「封裝層次之電致遷移測試」。其最終解決方案能使電致遷移測試時間縮短約達1000倍，同時省去了大量在每次測試所須的封裝時間和費用成本，提昇了製程可靠性測試結果的回饋速度並大幅降低測試成本的花費。

關鍵字

萃思 ； 製程可靠性測試 ； 衝突分析

並列摘要

Process reliability test, it's very difficult to achieve timeline for many products’ tests simultaneously because of the limitation of the machine capacity. As a result, it will cause serious demand conflicts. The purpose of this study is to improve the process reliability test methods to shorten the test time and speed up the feedback of test result with the same quality.
In this study, two problem solving concepts, which are forward and backward thinking, were combined in TRIZ analysis processing. By forward thinking of TRIZ analysis processing, we applied “Function Attribute Analysis (FAA)” to build a Function-Attribute system. After analyzing the functional conflicts of system and contradict parameters by “Cause-Effect & Contradiction Chain Analysis (CECCA)”, we followed “Contradiction Matrix and Invention Principle” to find out the trigger solutions and generate the specific solutions. Then by backward thinking of TRIZ analysis processing, “Trends of Engineering System Evolution (TESE)” was used to set up the goal of system by improvement. The system’s ultimate goal was achieved by “Ideally Final Result/Analysis”, and the idealities from the ultimate goal were reduced by “Trimming” to find the solutions. Finally, we adjusted the property of solutions to get an appropriate solution with brainstorming and “Function-Oriented Search (FOS)”.
This study is the forerunner on practically applying TRIZ methodology in problem solving by combining the forward and backward thinking, and the first one to apply TRIZ in process reliability test improvement field. The result indicated that we could get effective and efficient solution by this kind of TRIZ methodology. After TRIZ analysis, we get a final solution to replace "Package Level Reliability Electro-Migration (PLR-EM)" with "Wafer Level Reliability Isothermal Electro-Migration (WLR-IsoEM)", and to overcome the testing conflicts. It not only shortens the test time for approximately 1000 times and speeds up the feedback of test result, but also save necessary package required time and cost of process reliability test to improve the performance of system.

並列關鍵字

TRIZ ； Process Reliability Test ； Conflict Analysis

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