以電性崩潰為響應機制之微型氣體感測器

Miniaturized Ionization Gas Sensor based on Electric Breakdown

楊宗霖(Zong-Lin Yang)

指導教授 ： 盧向成

國立清華大學/電機資訊學院/電子工程研究所/碩士(2009年)

摘要

目前的氣體感測器可由感測機制分成各種不同的類型，離子化氣體感測器運用各種氣體對應不同的崩潰電場作為感測機制。此篇論文呈現了一個成功操作的離子化氣體感測器，此感測元件以鎳金屬作電極材料，並設計了3-30um不同間距的電極，並用微機電製程使其微形晶片化。我們量測了各種氣體在一大氣壓下不同間距的崩潰電壓如：氦氣、氬氣、空氣、二氧化碳及氧氣。此感測器表現了高敏感度、高選擇度且不受環境溫度、溼度及氣體流動的影響。實驗數據呈現的趨勢與 Paschen’s curve十分吻合。

關鍵字

氣體感測器 ； 離子化 ； 崩潰電壓 ； 微機電系統 ； 帕斯臣曲線

並列摘要

Gas sensor operate by a variety of fundamentally various mechanism. Ionization gas sensor operate by fingerprinting the electrical breakdown characteristics of distinct gases. This work presents the successful operation of an ionization gas sensor with gap spacing of 3-30 um and using nickel as electrodes material. The device is chip based and fabricated using micro-electro-mechanical system. We report the breakdown voltage of Helium, Argon, air, Carbon dioxide, Nitrogen and Oxygen of 3-30 um gap spacing in 760 torr. The sensor show good sensitivity and selectivity, and unaffected by temperature, humidity, and gas flow. The experimental data show alike tendency of Paschen’s curve.

並列關鍵字

gas sensor ； ionization ； breakdown voltage ； MEMS ； Paschen's curve

參考文獻

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