This research is aims for Taiwan used semiconductor equipment vendors, here summarize field investment experiences and future challenges for a reference before speed up the expending plan to China market. Enclosed also addressed the worldwide semiconductor market trend and China’s 12th five year plan. In order to foresee the overall Semiconductor Industry and the develop strategy in China when individual Taiwan used semiconductor equipment vendor which is going to step in. Here also try to find out some effective investment strategies and decision options through the methodology of Case Study and Analytic Hierarchy Process (AHP).