This research is to develop a SCOR-based supply chain analysis for semiconductor silicon substrate manufacturers and define supply chain performance according to industries. Then decide operation plans established on the basis of company strategy. Implementing SCOR model to a real-case, the company made the decision of process flow change for target supply chain. Process route for shipments to Japan customers was from Taiwan, China and U.S. Now it is from Taiwan to China or Japan and key performance of supply chain management including supply chain delivery reliability, responsiveness and agility improved.