離子感測場效電晶體應用於生物感測器之研究研究生:殷立德 指導教授:熊慎幹中原大學醫學工程系中文摘要 本論文之目的在於利用一分離結構之延伸式閘極離子感測場效電晶體,結合生物酵素之固定化技術,發展出一可拋棄式之葡萄糖生物感測器。分離結構之延伸式閘極離子感測場效電晶體乃是將離子感測薄膜從場效電晶體之閘極上,以導線遷出,並與待測液分離。因此,本量測架構之場效電晶體部分,不需置於水溶液中,也不易受到光照射之影響。此元件中分離出之感測架構具有容易製造及封裝之特性,並可減少元件之製造成本。本文將五種以玻璃為基底的感測架構加以研究比較,在比較如遲滯、時漂、光效應等元件特性後發現氧化錫/氧化銦錫玻璃之感測架構具有較佳之感測特性。因此本文更進一部的以此架構實現一低本可拋棄式之酵素化離子感測場效電晶體,並應用於葡萄糖濃度之感測。關鍵詞:離子感測場效電晶體、延伸式閘極感測場效電晶體、酵素化生物感測器、葡萄糖感測器、氧化錫。
Study of Biosensors Based on an Ion Sensitive Field Effect Transistor Student : Li-Te Yin Advisor : Dr. Shen-Kan Hsiung Department of Biomedical Engineering Chung-Yuan Christian University Abstract The objective in thesis is going to use a separative extended gate field effect transistor (EGFET) company with biologically enzymological technology to develop disposable glucose biosensor. Separative EGFET is divided the ion sensitive membrane from the field effect transistor. Accordingly, the field effect transistor does not need to put into solution and will not be affected by illumination. The separated ion sensitive membrane has advantage of simple and easy structure, fabrication and encapsulation, which can reduce the cost of device. The sensing part of this sensor was study in five structures based on glass substrate, and the SnO2/ITO glass was found as the structure with best characteristics such as hysteresis, drift and light-induced. Moreover, this structure was use to realize a low cost disposable enzyme modified extended gate field effect transistor (EEGFET) glucose sensor. Keyword : ISFET, EGFET, enzyme modified biosensor, glucose sensor, tin oxide