半導體晶圓廠自動物料搬運系統之設計

Design of Automated Material Handling Systems in Wafer Fab

李雨庭(Sammy Lee)

指導教授 ： 宮大川

中原大學/工學院/工業工程研究所/碩士(2001年)

https://doi.org/10.6840/cycu200100382

摘要

在半導體業界中，由於複雜的半導體製程及生產流程，而容易造成生產作業人員在搬運的過程中因疏失而產生損失，因此自動物料搬運系統成為半導體業必備的設施，並且很快地被廣泛應用在半導體業界。同時自動物料搬運系統透過改良自動物料搬運系統效率的技術及整合系統，而使得半導體生產線的物料供應及傳送順暢。

近年來，有很多有關自動物料搬運系統運行法則被提出來，而這些法則可藉由程式的修改，很快得到改善，但是硬體設施中的軌道佈局在系統被安裝完成後就很難更改。在最初系統建構階段，對於軌道佈局做出正確的選擇是非常重要的，一個錯誤的抉擇將導致整個系統績效不彰，而且造成無法彌補回復的地步。

本論文首先將節錄過去一些不同派車法則所做過的研究，並由法則中選擇業界常使用的最短路徑(Shortest Travel Distance, STD)以及先進先服務(First Come First Served)兩個法則，做為本論文第三章模擬實驗的派車法則，同時也分享目前業界實際應用的相關經驗。其次，主要的目地是論文參考相關經驗，提出三種業界常用的佈局，並以ARENATM為分析工具來比較自動物料搬運系統的三個不同軌道佈局之優劣，以提供系統建構前在成本考量及確保生產績效最佳化的前提下選擇一個自動物料搬運系統佈局的評估方法，避免因不當抉擇而需於系統運作後在工廠內修改所造成的成本損失。其結果顯示並聯迴圈(PDC)的運送績效最佳，而獨立迴圈(IDC)次之，同心迴圈(CDC)最差。由於並聯迴圈的運送績效最佳而且軌道數量少成本低，適合供路徑選擇要求少，系統穩定度高為設計重點的廠商使用。獨立迴圈與並聯迴圈的運送績效相差不大，卻提供了較彈性的路徑選擇和對於影響系統運作的外在因素，如機械故障、保養等較佳的應變能力，因此獨立迴圈的佈局適合軟體能力強且要求系統應變能力佳的廠商使用。本研究之模擬實驗設計有助於傳統自動物料搬運系統設計分析，並且這三個軌道設計方案也在半導體業界實際被安裝應用，驗證了這些方案的可行性。在最後的章節裡，將對半導體自動物料搬運系統未來的趨勢做介紹及探討。

關鍵字

軌道佈局 ； 半導體 ； 自動物料搬運系統 ； 無塵室

並列摘要

The Automated Material Handling System (AMHS) is indispensable to the Semiconductor wafer Fab and has been become rapidly widespread because of the great complexity of operation and process flow that cause the easy occurrence of miss-operation during wafers handling. It is a performance-effective improved through technique and integrated system to get wafers lot supply deliveries streamlined for the production line.

Recently a lot of the rules of system running have been proposed. The rules can be modified by software readily, however, the track layout of hardware is difficult to change while it works. It is very important to make the correct decision while designing the basic construction of track layout in the very beginning stage. Once the wrong decision was made the poor-performance was caused and impossible to recover or compensate.

First of all, this thesis is to give a comprehensive summary of previous research done in concept and to analyze several different rules. There will be a simulation of two dispatching rules, Shortest Travel Distance, STD, and First Come First Served, FCFS, which are most widely used, in current industry in chapter 3. And also shares with the related experience of current application in the semiconductor wafer fab. Secondly, there is a main purpose to based on the past experience and related information, here we propose three alternatives of AMHS tracks layout and analyze the three alternatives of AMHS track layout by using ARENATM simulation. To apply simulation before construction is proved to be a considerably more cost effective by means of ensuring optimized productivity rather than the cost of retrofitting changes within a fab after it has been completed and in production run stage. Results of simulation show that the best performance could be seen in Parallel Dual Circuit (PDC) and the next is Independence Dual Circuit (IDC) but Concentric Dual Circuit (CDC) is the last. The PDC demonstrate the best performance, less number of tracks and lower cost that is suitable for whom has system high reliability and less routing. IDC less performance but not much compared with PDC provides the more flexibility of route and less influence by variable factors, for example machine out of function or during preventive maintenance. Therefore, IDC is suitable for who has strong software capability and good system flexibility. This study examines the models and simulation experiments that assist with analyzing cleanroom material handling issues such as designing conventional automated material handling system. Some alternatives in the semiconductor industry were conducted to verify the effectiveness and the feasibility of this design concept. Finally, this thesis presents the current trend of wafer fabs and AMHS prospective aspect in Semiconductor.

並列關鍵字

Semiconductor ； Cleanroom ； Automated Material Handling System ； Track layout

參考文獻

[01] Bader, Besler, Schliesser and Dorner, A View to the Future – A Modular Simulation Cost-Efficient Fab-Wide Planning and the Simulation of Automated Material Handling Systems in the semiconductor Industry, 1999.

[03] Campbell, Laitinen, Overhead Intrabay Automation And Microstocking – a virtual fab case study, 1997.

[04] Castagna, Albert and Aarab, Piloting of AGV Systems with dispatching rules, La chantrerie, CP 3003, 44087 Nantes Cedex 03, 1996.

[05] Chang, S.H. and Egbelu, P. J.,” Dynamic Relative Positioning Of AGVs In A Loop Layout To Minimize Mean System Response Time”. Internation Journal of Production Research, 34(6), 1655-1673, 1996.

[10] Espufia and Puigjaner., Transport Planning And Scheduling Using Automatic Guided Vehicles In A CIM Environment, 1999.