整合型表面聲波陣列感測器之研究

The Study of SAW Integrated Array Sensors

黃聖閔(Sheng-Min Huang)

指導教授 ： 鄭湘原

中原大學/工學院/電子工程研究所/碩士(2003年)

https://doi.org/10.6840/cycu200300618

摘要

中文摘要

現今的表面聲波元件已被廣泛地應用在各通訊系統領域中，作為頻率選取與雜訊抑制的濾波器元件。運用表面聲波元件其聲波機制，感測出質量微量變化的特性也備受注意。而表面聲波元件表面上所塗佈之聚合薄膜可作為化學辨識感測器，並廣泛地運用在不同之有機氣體感測。
在本論文中我們利用雙埠表面聲波元件來製作皮爾斯型式的振盪器。其表面聲波元件之中心頻率及插入損耗分別為157MHz和-19.408dB。在製作完後的振盪器其震盪頻率與輸出功率分別為157.040MHz與17.56dBm，而其相位雜訊為-77.79dBc/Hz@100KHz。最後配合商用之混頻元件，完成整合型表面聲波感測器之製作與量測，而其輸出功率為2.38dBm@531KHz。
本論文感測實驗中，在表面聲波振盪器上塗佈聚亞烯胺和纖維醋酸酯薄膜來偵測相對溼度變化。此外，於表面聲波振盪器上塗佈聚乙烯亞胺、乙基纖維素、聚苯乙烯與三氟丙基-甲基聚矽化烷等四種薄膜量測甲酚、水、二氯乙烷、苯與酒精蒸氣其質量所造成之頻率變化。在實驗中所感測出之結果將在本文中作相關的討論。

關鍵字

壓電 ； 表面聲波元件

並列摘要

Abstract

Surface acoustic wave (SAW) devices have been used as filters in modern communication systems. In addition, Quartz SAW device using surface acoustic wave modes have been the most extensively used in mass sensing devices. SAW devices coated with polymer as chemical sensors become popular in the detection of a variety of organic gases.
This thesis presents a Pierce-type oscillator using two-port SAW devices. The center frequency and the insertion loss of SAW device are 157MHz and –19.408dB respectively. The output frequency and power of oscillator using SAW device is 157.040MHz and 17.56dBm respectively, while its phase noise is -77.79dBc/Hz@100KHz. And the resulting power of SAW integration sensor after frequency differentiation is 2.38dBm@531KHz.
SAW ocillators with organic films using polyimide and cellulose acetate detect the variation of the relative humidity. In addition, SAW ocillators coated with the poly(ethylenimine), ethyl cellulose, polystyrene and OV210 films detect variations of frequency for sensing vapors of water, ethanol, benzene, m-cresol and dichloroethane. Results were obtained and discussed with SAW devices for the organic gas detection.

並列關鍵字

SAW device ； Piezoelectric

參考文獻

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