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  • 學位論文

電場掃流微過濾分離Silica懸浮液

Crossflow Electromicrofiltration of Silica Suspensions

指導教授 : 莊清榮
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摘要


摘 要 近年來水資源不足及溶劑污染的問題,突顯廢液處理及回收之重要性。掃流薄膜過濾已廣泛應用在工業廢液處理程序,為了提高薄膜分離效率,結合電場與掃流作用之過濾技術早已被提出,然而對其過濾特性的瞭解仍甚有限,為探討該技術於電子產業廢液(如CMP廢液)處理之應用,本研究自行配置SiO2懸浮液(包含水溶液及IPA溶劑) 分別以0.2μm之Nylon及PTFE薄膜進行外加電場掃流微過濾實驗,探討電場強度及其它操作條件等對過濾效能的影響,評估此技術對於CMP廢水及廢溶劑回收再利用之可行性。 實驗結果顯示,施加電場之擬穩態濾速約隨電場強度提高而呈線性增加,掃流速度及壓差對濾速之影響相對於電場作用之影響甚微。對於SiO2懸浮液(水溶液)於壓差0.4 bar,掃流速度為0.203 m/s下,施加5000~10000 V/m電場操作時,其平均濾速約可提高24~46倍,此濾速提升主要來自於電滲透作用,其電滲透流速約為擬穩態濾速之75~86%,將此電場強度作用下之擬穩態濾速, ,與由 所預估之值相比較,前者高約45%。而於脈衝式電場操作之擬穩態平均濾速約為固定電場者與未施加電場者兩濾速的平均值。電場施加下其過濾之電能效率及濾液濁度品質均甚優於未施加電場者,以濁度而言符合一般自來水標準,可直接回收使用於一般用水上。 對於SiO2懸浮液(IPA溶劑)以PTFE薄膜進行過濾,顯示此類含溶劑廢液仍可以電場促進其濾速及提升濾液品質,且以固定電場操作較宜,因此以此技術為前處理,先行去除廢液中懸浮粒子,伴隨後續薄膜滲透蒸發及膜蒸餾等單元, 對於高科技產此類溶劑廢液之回收再利用的應用有其發展潛力。

並列摘要


ABSTRACT Currently, the disposing and recycling of industrial waste liquid are essential for the substantial development of Taiwan, due to the seriously deficient in the water resource and harmful in the solvent pollution. Crossflow membrane filtration has been used extensively in the process of wastestream treatment, especially for the filtrate to be recycled. In order to enhance the separation capacity in crossflow membrane filtration for fine suspensions, a combination of shearing action and electric field has been developed and also recognized as an effective means for improving the filtration performances. But so far, the understanding of the principles of such operation is still very limited. The objective of this study was to investigate the characteristics of electro-microfiltration of SiO2 suspensions used for the chemical mechanical polishing (CMP) waste liquid in the electronics industry. The effects of electric field strength, electric field mode and other operation parameters such as crossflow velocity and transmembrane pressure etc. on the filtration performance by using 0.2 μm Nylon and PTFE membranes were analyzed to show the potential of applying the electric field to the crossflow filtration for the recycling of CMP waste liquid treatment. Experimental results showed that the crossflow velocity and transmembrane pressure have a little influence on the filtration rate under the system. However, the filtration rate increases significantly with the addition of electric field, the filtration rates obtained being almost 24~46 times that only by shearing action as the E applied in a range of 5000~10000 V/m. It was found that about 75~85% of the pseudo-steady state filtration is contributed by the electroosmotic flux. In the E range used in the study, the measured steady-state filtration rates are about 45 % greater than the predicted values from the theoretical model, and the average filtration rates using pulsed electric field mode are somewhat larger that the mean values between that of constant electric field and that without electric field. The application of electric field for the crossflow filtration of CMP waste liquid not only gives a significant enhancement in the energy efficiency but also improves the filtrate quality to a level better than the requirement for reuse in industry. The crossflow electro-microfiltration of SiO2/IPA suspension by PTFE membrane can also improve the filtration rate and the filtrate quality, especially for the condition under fixed electric field strength. Therefore, such a process may be an effective pretreatment for the subsequent pervaporation and membrane distillation operations in the recovery of solvent from the electronics industry wastestream.

參考文獻


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