TFT-LCD陣列製程中加工時間監控系統之研究

TFT-LCD（Thin Film Transistor - Liquid Crystal Display）的陣列（Array）製程設備多屬高單價的自動化設備，並且是以設備為主體的生產模式。陣列製程設備的生產能力係以單位加工時間來評估，且各機台的單位加工時間直接影響設備的生產效率，故監控各機台單位加工時間的表現，在製造管理上就顯的特別重要。個案公司的單位加工時間原以加工批量間開始時間的差異，除上批量加工數以作為資料的呈現。但考量陣列製程產品種類多、製程步驟繁複、機台數量多、複雜性高與加工類型不一等生產特性，使得此原始單位加工時間資料存在許多的變異與不準確性。針對上述問題，本論文提出監控單位工時的簡易法則以適用於陣列製程設備，此法則首先設定寬放比例並計算容許的單位加工時間，計算此寬放範圍內涵蓋其它工時的比例，再依照篩選比例來考慮資料的可否採用。本法則依據加工設備的特性與歷史工時資料，訂定合理的寬放比例與篩選比例參數並以案例驗證。本論文討論監控系統查詢平台的建構用以呈現平均單位工時，可提供TFT-LCD製造廠內各部門使用，做為產能規劃與評估、製程參數調整監控、設備生產效率維持等依循的標準，進而提昇TFT-LCD製造廠的管理績效。

關鍵字

陣列製程；單位加工時間；監控系統

並列摘要

Most manufacturing machines in TFT-LCD (Thin Film Transistor - Liquid Crystal Display) array process are very expensive and highly automatic. In such a case, the productivity of a plant is measured with the machine time and is closely correlated with the tact times of all machines. In order to manage the shop floor, monitoring the tact time of every machine is a basic requirement. In case of C-Company, tact time is defined as “processing time divided by lot size”. There are many factors, such as multi-process steps, batch type equipments and process routes, which may cause variance and inaccuracy of calculating the tact time. This research proposed a method to clean the raw data for computing the average tact time. Two parameters such as time tolerance and coverage ratio need to be set for data cleaning. Based on the time tolerance, the range of each raw tact time data was calculated. Using coverage ratio, the raw data with higher ratio numbers would be kept to calculate the average tact times for a specific time period. Based on equipment characteristics and operation history, the vales of these two parameters could be obtained. Some shop floor data were applied to verify this proposed method. A tact time monitoring system in a web based environment was discussed, and this monitoring system provided valuable tact time information in a user friendly platform to all array manufacturing departments. With the proposed method and platform, production management in the C-Company should be more effective and efficient.