一種雙向剪應變型壓電馬達之研製

Development of a Two-way operation Piezoelectric Ceramic Motor

林浩平(Hao-Ping Lin)

指導教授 ： 丁鏞

中原大學/工學院/機械工程研究所/碩士(2015年)

https://doi.org/10.6840/cycu201500935

摘要

本論文的目標為研製一種具雙向推動功能之d14型式剪應變型壓電陶瓷馬達，並比較一般常使用d33與d15型式的壓電陶瓷馬達。與d15型式壓電元件相比，一般常使用的d15型式壓電陶瓷元件為了產生更大的輸出速度與力，必須沿著極化方向以增加其厚度，然而d14型式壓電陶瓷容易藉由增加元件垂直於接觸面方向的長度來達到增加輸出性能的目的，並不須透過高電壓的極化與提升輸入電壓的方式，另也能藉由增加尺寸來降低其壓電元件的自然共振頻率。本論文使用壓電陶瓷材料為PZT-8，其具有較高的機械品質係數外，亦具有較大的輸出位移量而適用於壓電致動器。利用Ansys有限元素模擬分析d14型式壓電陶瓷致動器之共振模態以及簡諧分析，並進行實驗測試後，經驗證兩者結果相近。另也探討其驅動方式以及運動軌跡。亦將馬達架設於平台與旋轉軸承上進行馬達功能測試。對d14型式壓電致動元件輸入±150V之電壓，並分別能產生0.485μm的縱向振幅以及1.03μm的橫向振幅。再將馬達架設於線性滑軌(滑條)以及旋轉軸承(轉子)上，並透過適當之電壓輸入訊號，可以得到最大線性速度約為32.3mm/s，以及最大轉速約為66.667rpm。

關鍵字

剪應變型壓電馬達 ； d14與d15壓電陶瓷材料

並列摘要

A new type of piezoelectric ceramic motor using d14 to generate face-shear deformation is developed. In particular, two-way operation to provide forward and backward linear motion as well as clockwise and counterclockwise rotary motion is completely designed. Because of the polarization direction and the driving electrode of the usually seen d15 ceramic motor, large input voltage needs to apply to preserve enough electric field while attempting to increase the deformation by increasing the thickness. Different from d15, increasing height will increase deformation but with no need of applying large input voltage to maintain the electric field, and reduce the resonance frequency. Because of the above advantage, structure of d14 piezoelectric motor would be ideally built with a nearly square shape. Mode shape and harmonic analysis by using ANSYS simulation are carried out to search for ideal deformation under certain resonance frequency. Both analytical and experimental results are in a good agreement. The driving signal and motion trajectory is also investigated. Ceramics PZT-8 is used to design piezoelectric actuator. For a single piece of the built sample actuator with ±150V applied voltage, it is able to generate vertical and transverse vibration amplitude of about 0.485µm and 1.03µm respectively. The stator integrated with a linear stage (the carriage) and rotary bearings (rotor) as well as employed with an appropriate signal, the maximum linear and rotation speed is measured about 32.3mm/sec and 66.667 rpm respectively.

並列關鍵字

face-shear deformation piezoelectric motor ； d14 and d15 ceramics

參考文獻

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