在鈉玻璃上使用光輔助水溶液法生長氧化鋅奈米柱膜

Growth of ZnO nanorod film on soda glass by light assisted aqueous solution deposition

蔡承志(Cheng-Chin,Tsai)

指導教授 ： 李明逵

中原大學/電機資訊學院/電子工程研究所/碩士(2017年)

https://doi.org/10.6840/cycu201700397

摘要

透明、高電子遷移率薄膜電晶體是先進顯示器發展之關鍵，因其透明則亮度高，可以低功率操作，因電子遷移率高反應速度快，可供高解析度顯示器使用，近年來迅速發展之金屬氧化物如氧化鋅(ZnO)可滿足這些要求。
在本研究中，以水溶液沉積法於鈉玻璃基板上成長ZnO奈米柱陣列並使其合併成氧化鋅奈米柱膜，由於鈉玻璃基板上氧化鋅奈米柱間之間距較大，無法使氧化鋅奈米柱合併成氧化鋅奈米柱膜。
為了提高柱徑大小，提高柱間之合併程度，於是使用紫外光輔助成長氧化鋅奈米柱膜，對於在鈉玻璃基板生長氧化鋅奈米柱膜相當具有潛力

關鍵字

水溶液沉積法 ； 氧化鋅奈米柱膜 ； 紫外光 ； 鈉玻璃

並列摘要

Transparent and high electron mobility thin film transistor (TFT) is the key technology for modern displays. The transparency can enhance the brightness of display at lower operated power. The high electron mobility can enhance the switching speed and resolution. Metal oxides, for example zinc oxide (ZnO) can meet those requirements.
In this study, we grow ZnO nanorod array and transform into ZnO nanorod film on soda glass substrate by aqueous solution deposition (ASD).
To grow ZnO nanorod array on soda glass substrate under the same growth conditions, ZnO nanorod array cannot be transformed into ZnO nanorod film due to larger lattice mismatch and the larger gap between ZnO nanorod than those of ZnO nanorod array on sapphire.
In order to increase the size of nanorods and enhance the merge of ZnO nanorods, UV assisted ASD is promising for the growth of ZnO nanorod film transformed from ZnO nanorod array.

並列關鍵字

aqueous solution deposition ； ZnO nanorod film ； UV ； soda glass substrate.

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