電梳驅動定量微幫浦之設計

Design of constant ration micropump with comb drive

徐名成(Ming-Cheng Shiu)

指導教授 ： 張耀仁

中原大學/工學院/機械工程研究所/碩士(2006年)

https://doi.org/10.6840/cycu200600297

摘要

摘要
本文著眼於微幫浦設計與模擬，在此研究中提出一個新式的微幫浦，較以往所見不同之處是變更微幫浦的致動源，利用現在微機電系統中發展相當成熟的靜電驅動的梳狀致動器(Comb drive)，簡稱為電梳驅動，做為微幫浦的驅動源，另外於腔體部分設計一個無閥門的腔體，利用活塞的往復運動方式，達成流體定量的輸出的目的。微幫浦的作動方式，利用電壓產生之靜電力來帶動活塞向上位移，當活塞向上位移時，無閥門腔體內迅速充滿流體；當活塞向下位移時，迅速的將無閥門腔體內的流體輸出，電梳驅動微幫浦的行程控制則可利用電梳的電壓變化來精確的控制，以達定量輸出的目的。
本研究的方法在建立電梳驅動微幫浦的靜電、機械性及流體的分析模式，藉以模擬電梳驅動微幫浦的特性。此設計模擬係利用COMSOL Multiphysics多重物理量的有限元素分析軟體，進行腔室內流體之運動分析和電梳致動及折疊彈簧結構強度分析等，以求一套具有最佳控制效能的系統，並且可以得到一個可控制流量的微幫浦。
本文所設計之電梳驅動定量微幫浦晶片，經由電腦數值模擬數據，可以確認此微幫浦能夠成功藉由電壓控制流體輸出，並可精確控制輸出量。如此可整合於生物晶片，檢體定量的導入，如PCR 晶片的檢體導入或十字電泳晶片檢體導入、陣列式生物晶片檢體導入等。

關鍵字

電梳驅動 ； 微幫浦

並列摘要

Abstract

This paper deals with pump design and pump simulation. This researcher comes up with a new form of pump where micropump actuator is different than before. Namely, the micropump utilizes comb drive as its actuator. In addition, in the micropump’s chamber this researcher designs a piston compressing which helps achieve constant ration of fluid. The chamber is full of fluid when the piston goes up slowly; however, the fluid outputs when the piston goes down. In order to achieve constant ration of fluid, this researcher precisely controls the quantity of fluid through voltage variations.
The research method is to simulate the features of micropump based on ration analysis of comb drive. This researcher can analyze fluid in the chamber and the structures of comb drive by simulating the pump. Therefore, this researcher can achieve constant ration of fluid in the micropump under the control of such system.

並列關鍵字

micropump ； comb drive

參考文獻

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