現今基本加速度計的小零組件需求不斷的增加,從原本只有單純的汽車與導航的應用結合,到現在以生物醫藥、消費性電子,甚至到體育設施的性能強化和安全性監測的產品都包含在內。因此較廣的感應範圍和較小的感應解析度是必需的。對於低電容感測技術,雜訊層主要是由感測電路的輸入參考訊號的雜訊而來。因此本論文提出一個簡單且健全的連續時間電流檢測架構,採用振幅調製技術來補償低電容感應環境。在前端放大器採用高線性度與提高平坦化的轉導,以抑制非線性的輔助差動對的三階非理想效應。其結果在一個輸入1mV/g以及輸入寄生電容為pico法拉中,檢測出16mV/g ±60g的檢測範圍 。本論文以台積電0.35um 2P4M5製程實現,晶片面積為0.5×0.5mm2。
The increasing demand for accelerometer-based gadgets has expanded way beyond from mere automotive and navigation application portfolio to biomedical, consumer electronics and even sports facilities for performance enhancement and safety monitoring. Higher sensing range and smaller sensing resolution are ideal requirement to minimize the noise floor. For low-capacitance sensing, noise floor is dominated by the sensing circuit input referred noise contribution. As such, this work presents a simple but robust continuous-time current sensing architecture using amplitude modulation technique to compensate the low-capacitance sensing environment. The front-end amplifier used has high linearity and wider flattened transconductance enhanced by its nonlinear auxiliary differential pair that ensures robustness to third-order nonideal effects. As a result, wider sensing range of ±60g at 16mV/g minimum detectable output response from a 1mV/g input in the presence of a few pico Farad input parasitic capacitance. The test chip will be implemented using TSMC 0.35μm 2P4M process with a chip area less than 0.5 0.5 mm2.
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