圖形化藍寶石基板表面以提升覆晶式發光二極體之光輸出特性

本文主要研究覆晶式發光二極體透過圖形粗糙化藍寶石基板表面，藉以減少內部全反射及增加晶粒表面側邊出光，來達到對光輸出特性的提升。我們使用0、30、60、120分鐘不同乾蝕刻時間，比較光電特性並觀察其圖形變化。由實驗結果發現，操作電流在350 mA，表面無粗糙圖形之元件，其光輸出為460 mW；蝕刻時間120分鐘粗糙圖形之元件，其光輸出為491 mW，比較兩者光輸出特性提升約10%，光學模擬結果顯示，乾蝕刻120分鐘之粗糙化圖形，模擬的總光通量亦有相同的提升。

關鍵字

覆晶式發光二極體；圖形化藍寶石基板；表面粗糙化

並列摘要

Nitride-based high-power flip-chip light emitting diode （FC LED） with patterned sapphire surface （PSS） was proposed and realized. The generated light in the active layer is mostly absorbed by the gradually disappears due to total internal reflection . It is therefore very important that the photons generated from LEDs experience multiple opportunities of escaping to improve the light extraction efficiency. We use the of 0, 30, 60, 120 minutes different dry etching time, compare the optical and electrical properties and observe the graphic changes. Under 350 mA current injection, it was found that output powers were 460 and 491 mW for the conventional FC LED and FC LED with patterned sapphire surface, respectively. In other words, we can enhance the light output power by 10% without increasing operation voltage of the fabricated LED. The enhancement efficiency can be simulated and the simulated results showed the same trend as the results of experiment.

並列關鍵字

Flip-Chip light emitting diode ； patterned sapphire ； surface roughness

參考文獻

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圖形化藍寶石基板表面以提升覆晶式發光二極體之光輸出特性

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