本研究主要為以陽極氧化鋁(anodic aluminum oxide ,簡稱AAO)孔洞製作抗-反射結構之研究,先對鋁片進行陽極處理,以製造出具有均一性孔洞陽極氧化鋁模板,將玻璃基板塗佈PDMS及H-PDMS兩種聚二甲基矽氧烷材質、在鋁片上塗佈OG高分子,再將有PDMS、H-PDMS的玻璃基板壓印在有OG高分子的AAO上,最後去除AAO模板,得到具有微米柱形結構的高分子基板,以製作出抗-反射結構。 實驗上運用鋁薄膜基板來製作多孔性之陽極氧化鋁基板,並經由製程條件之控制,以獲得均勻性佳且具排列性之孔洞。此技術製作之抗-反射結構具有成本低、製程簡單、具大面積翻製可能,預期可應用於平面顯示器面板、手機面板之抗-反射結構層。
This project is to study by using the anodized aluminum (anodic aluminum oxide, AAO) holes produced anti-reflective structure. The anodized aluminum was used to produce a uniform anodic aluminum oxide template of holes,and the glass substrate was coated with PDMS and H-PDMS, two kinds of pole dimethyl siloxane material. OG polymer then was coated on aluminum, and the glass with PDMS,H-PDMS was imprinted on a glass substrate with OG polymer. After curing the OG polymer, the AAO template was removed, we have got a cylindrical nano-structure of the polymer substrate to get the anti-reflective structure. This technique can produce anti - reflective structure with low cost, simple process, with a large area of polymer. It may be expected to be used in flat panel display, mobile phone panel anti - reflective structure layer.