以電鍍製程在D型光纖光柵結構上製作鎳金屬保護層

Nickel coating on the D-shaped optical fiber grating structures by electroplate process

翁國禎(Guo-Zhen Weng)

指導教授 ： 翁豊在

共同指導教授 ： 何智廷(Chi-Ting Ho)

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2010年)

摘要

本研究提出D 型光纖的研磨技術，並結合黃光微影 (Photolithography) 製程、光學全像術干涉微影(Holographic Interference Lithography)技術、離子式蝕刻機、超音波震洗機、電鍍機，製作出金屬D 型金屬布拉格光纖光柵濾波元件。

首先以多模光纖製作成研磨試片後，進行試片單邊研磨(Side-Polished)，其精確的研磨拋光直到光纖纖芯為止。下一步進行黃光微影製程與光學全像干涉微影技術，來製作繞射光柵濾波元件；利用旋轉塗佈正光阻，將短週期布拉格表面光柵曝光於玻璃基板上，並且以此繞射光柵元件利用離子式蝕刻機蝕刻方式加深光柵深度直達光纖上。

最後我們將以超音波震洗機震洗D型光纖光柵使用化學鍍製程鍍上薄鎳導電層，再以電鍍機於表面電鍍上ㄧ層鎳金屬材質，達到保護所製造D型光纖光柵之效用，其光柵週期與深度可由原子力顯微鏡(AFM)觀察，及光學傳輸特性可由ASE寬頻光源與光纖極化器利用光頻譜分析儀(OSA)等測量與紀錄實驗之結果。

關鍵字

D型光纖光柵 ； 光柵 ； 鎳金屬 ； 電鍍製程 ； 無電鍍製程

並列摘要

This research is to study a D-shape-fiber polishing technology and combine with Photolithography process, optical Holographic Interference Lithography technology, plasma etching machine, ultrasound shock washing machine, and electroplating machine to produce the D-shape Fiber Bragg Grating side-polished the metal filter components.

First of all, we made the multi-mode fiber up to the fiber core. Next, photolithography process and optical holographic interference lithography were used. This step is to produce diffraction grating on D-shape-fiber ; by using spin to coat the positive photoresist, we short-period Bragg gratings was fabricate on the D-shape-fiber, and then the Reactive ion etching machine was done need to enhance the depth of the grating.

Finally, we used the ultrasonic washing machine to wash the D-shape -fiber, and used the electropless nickel to plate the conductive thin nickel
on the fiber, then we used the electroplating technology to nickel material on the fiber surface to coat .The grating period and the depth were on service by the atomic force microscope (AFM), and the optical transmission characteristics was measured by the ASE and the optical spectrum analyzer (OSA) was used to measure and record the results of experiment.

並列關鍵字

D-shaped optical fiber ； electroplating process ； grating ； nickel coating

參考文獻

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