應用二氧化鈦奈米結構於表面聲波紫外光檢測器

Apply TiO2 Nanostructures to Surface Acoustic Wave Ultraviolet Photodtectors

溫騏維(Chi-Wei Wen)

指導教授 ： 水瑞鐏

國立虎尾科技大學/電機資訊學院/電子工程系碩士班/碩士(2013年)

摘要

本論文使用射頻磁控濺鍍系統製備二氧化鈦薄膜，透過調整濺鍍過程中的氣體比例、濺鍍壓力以及薄膜退火之溫度，以得到高品質之二氧化鈦薄膜。利用化學水熱合成法製備二氧化鈦奈米柱，經由不同pH值濃度之水溶液與成長時間的匹配，合成出提高光吸收能力之二氧化鈦奈米柱。接著將高品質之二氧化鈦薄膜與高光吸收能力之二氧化鈦奈米柱結合表面聲波元件，並將該元件應用於紫外光之檢測。
　　材料分析方面，藉由X光繞射儀（XRD）、場發射掃描式電子顯微鏡（FE-SEM）、螢光光譜儀（PL）之檢測，對二氧化鈦薄膜及奈米柱進行晶體結構、表面形貌與光致發光等特性作分析。
　　元件分析方面，藉由網路分析儀與阻抗分析儀之量測，分別分析插入損耗和相位之元件響應特性以及分析電阻值和電容值之元件阻抗特性。

關鍵字

射頻磁控濺鍍系統 ； 二氧化鈦 ； 表面聲波元件 ； 紫外光

並列摘要

In this paper, by using RF magnetron sputter system prepared titanium dioxide thin films. In order to obtain high quality of titanium dioxide films, sputtering process by adjusting the gas ratio, the sputtering pressure and the annealing temperature of the thin films. Using hydrothermal method prepared titanium dioxide nanorods for the sake of synthesizing to increase the light absorption capacity of titanium dioxide nanorods by adjusting different pH solution and growth time matching. The ultraviolet detector combines the surface acoustic wave devices with the high quality titanium dioxide thin film and high light absorption capacity of titanium dioxide nanorods
　　In the material analyze, the crystalline structure, surface morphology and luminescent characteristics of titanium dioxide thin films were examined by X-ray diffraction, scanning electron microscopy, and photoluminescence spectrometer.
　　In the detector analyze, the insertion loss and phase, resistor and capacitor were analyzed by Network Analyzer and LCR Meter

並列關鍵字

RF magnetron sputtering ； Titanium dioxide ； Surface Acoustic Wave Device ； Ultraviolet

參考文獻

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