六自由度奈米量測機控制

Control Of A Six-Degrees-Of-Freedom Nanomeasuring Machine

盧群中(Qun-Zhong Lu)

指導教授 ： 沈金鐘

國立虎尾科技大學/工程學院/自動化工程研究所/碩士(2012年)

摘要

本論文目的在整合六自由度奈米測量機平台之控制器，包括平台之改善及組裝，並搭配六自由度誤差量測系統以進行平台回授控制。此平台包含兩個部份，第一個部份為利用壓電致動器推動之四自由度壓電補償平台，第二個部分為利用音圈馬達及交叉滾子導軌架構而成之XY雙軸滑軌平台。此壓電補償平台有Z、θx、θy、θz等四自由度之運動用來補償XY雙軸滑軌平台移動時所形成的誤差（Z軸方向誤差、Pitch、Roll和Yaw），使整個平台系統的定位精度提高。回饋訊號由六自由度的量測系統得到，此系統包含三組雷射干涉儀與兩個角度量測系統，可將平台移動時六個自由度誤差回饋以進行控制。控制器部分利用順滑模態控制器搭配PID控制器。此平台可提供量測次微米級結構達到奈米級精度。

關鍵字

壓電致動器 ； XY軸滑軌平台 ； 順滑模態控制器 ； PID控制器 ； 六自由度 ； 音圈馬達 ； 四自由度壓電平台

並列摘要

The purpose of this paper is focusing on the integration of six-degrees-of-freedom nanomeasuring machine stage controller, including the assembly and improving of the stage. We then and combines this stage with six-degrees-of-freedom error measuring system for feedback control. This stage includes two parts: First part is a four-degrees-of-freedom PZT stage driven by piezoelectric actuator and second part is a driven by roller guided X-Y stage utilizing two voice coil motor. The PZT stage has four-degrees-of-freedom movements (Z, θx, θy, θz) that can compensate for the errors which are caused by moving the XY axis stage. Precision feedback is provided by the six-degrees-of-freedom measuring system with three interferometers and two angle measuring system. Sliding-mode controller and PID controller are used to control this machine. This measuring machine can be used to measure submicron-scale feature with nanometer-scale accuracy.

並列關鍵字

piezoelectric actuator ； X-Y stage ； sliding-mode controller ； PID controller ； six-degrees-of-freedom ； voice coil ； PZT stage

參考文獻

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