介觀機具線性軸性能檢測系統之建立

The development of the linear axis measurement system of Meso-Scale machining

周敬棠(Ching-Tang Chou)

指導教授 ： 蔡榮鋒

國立虎尾科技大學/工程學院/動力機械工程研究所/碩士(2005年)

https://doi.org/10.6827/NFU.2005.00001

摘要

本文針對微小行程量測系統 (介觀機具) 提出兩種線性軸性能檢
測系統 (1) 三角雷射量測系統、 (2) 雷射二極體與四象儀量測系統。
三角雷射量測系統架設容易，量測原理簡單，可應用一維、二維、
三維的線性軸靜態與動態檢測，不過價格昂責，且量測結果不佳，所
以只做一維方面的校正，未再做深入的探討。
四象儀所建構出來的線性軸檢測系統，是由兩組四象儀及兩組雷
射光源透過夾治具所組成，而目前系統已完成軟硬體的建立，經由校
正及實機測試，系統之準確度可達 0.5μm，重複精度可達 1μm，且
能容易簡便的方式量測到一維、二維、三維的線性軸靜態與動態檢
測，除此之外，本實驗架構還針對機台的高速進給率下，分析其循軌
路徑以檢測控制器的控制性能以及補償高速進給率下所造成的誤
差，使用嘗試誤差法配合田口方法補償之，效果良好，可從原本誤差
在 250μm-700μm 的差值補償最小可至 10μm 之內。

關鍵字

non

並列摘要

In this thesis, the two linear axis measurement systems for the Meso-scale
machining were developed: (1) the laser triangulation measurement system for linear
axis performance measuring, and (2) two PSDs and lasers with fixtures measuring
system for linear axis performance measuring.
It is easy to set up the laser triangulation measurement system. In addition, its
measuring principle is simple and the system can be applied to 1D、2D、3D linear axis
measurement. However, price of the component is expensive and the result of the
measurement is not satisfying enough, so it is only studied in verifying and 1D
measuring without going any further exploration.
The PSDs measurement system consists of 2 laser and 2 PSDs with the fixtures.
So far, both software and hardware were established in this measurement system
through verifying and testing. Its accuracy can be up to 0.5μm、the uncertainty
can be up to 1μm, and it is easy to measured 1D、2D、3D static and dynamic error of linear
axis of the Meso-scale machining. Besides, the measurement system was focused on
high feed rate of the machining stage, analyze the contouring to estimate performance
of the controller of machining. And the error as a result of high feed rate of the
machining stage was compensated with Taguchi methods. The result is reasonable. It
can be compensated since original error in 250μm-500μm to be reduced in 10μm in
the optimum state.

並列關鍵字

non

參考文獻

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