微放電表面特徵在點面極間之靜電效應

Electrostatic Effect between Tip Electrode and μ-EDMed surface

黃益成(Yi-Cheng Huang)

國立虎尾科技大學/工程學院/動力機械工程研究所/碩士(2005年)

摘要

靜電力具有尺寸效應的關係，在微米尺度中，常被取用為驅動源，而以往探討靜電力時大多忽略表面粗糙度的影響，故本論文以微放電加工後的表面來說明加工表面特徵對於靜電力的重要性。研究首先利用針尖金屬與微放電加工後的薄片，作崩潰效應實驗，找出會產生絕緣崩潰時的間隙與電壓之間關係；應用ANSYS有限元素分析軟體建立Point-to-plane模型，模擬非接觸式靜電力顯微術(EFM)，計算出靜電力梯度與實際EFM量測微放電加工後薄片的靜電力梯度作比較。最後以電解加工改善微放電表面特徵，表面粗糙度由Rmax=1.359μm降低到Rmax=0.623μm，平均靜電力梯度也提高了3倍。

並列摘要

An electrostatic force which is often acted as the drive force in the micro scale field should be strongly influenced by the change of the gap between electrodes.However,most of the researches have not considered the surface profile while analysing the electrostatic effect.The study focuses on the induced electrostatic force between the μ-EDMed electrodes surface consisted of craters.Apart from,the breakdown voltage relating to the gap between electrodes is also interested through micro-discharge experiment.A two dimensional simulations of the electrostatic force gradient(EFG) between the tip and the sample has been performed in this study,and experimentally confirmed by the EFM measurement.In terms of the better options the improved surface should be expected.

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