原子層沉積與薄膜封裝應用於可撓式有機發光二極體

本論文研究採用真空蒸鍍方式，製作可撓式綠光磷光有機發光二極體。首先利用PEN作為可撓式元件之基板，PEDOT:PSS作為電洞注入層，WHT-215作為電洞傳輸層(hole transport layer)，主發光層(emitting layer)為TCTA、並摻雜綠光磷光材料Ir(ppy)3，搭配TPBi作為電子傳輸層(electron transport layer)，接著蒸鍍陰極材料為LiF/Al，即可得到可撓式綠光磷光有機發光二極體。接下來採用原子層沉積方法沉積ALD薄膜作為元件之封裝阻水膜。本研究使用之元件結構為:PEN /ITO/PEDOT:PSS(55nm) /WHT-215(5nm) /TCTA:Ir(ppy)3(30nm:15%)/ TPBi(30nm)/ LiF(1nm)/Al(100nm)，綠光元件在電流密度5 mA/cm2下，亮度可達2200 cd/m2，電流效率可達44 cd/A，功率效率可達23 lm/W。經由原子層沉積系統沉積阻水阻氣膜當作封裝薄膜，封裝薄膜結構 [ZnO/Al2O3]19，由鈣測試量測19對阻水膜之水蒸氣滲透率(Water Vapor Transmission Rate，WVTR): 5.2x10-3 g / m2/ day，經過壽命量測儀，在初始亮度1000cd/m2下測得封裝後延長之壽命為150小時相較於裸片增加了37.5倍。以PECVD(plasma enhanced chemical vapor deposition)系統沉積TiO2薄膜，改變氧氣流量、電漿功率，可以得到不同折射率之TiO2薄膜，未來可應用於OLED的光萃取實驗。

關鍵字

可撓式有機發光二極體；原子層沉積；水蒸氣滲透；二氧化鈦

並列摘要

The study of vacuum deposition methods, production of flexible green phosphorescent organic light-emitting diodes. First, the use of PEN as the substrate of the flexible device, WHT-215 as a hole transport layer, the main light-emitting layer of CBP, a green phosphorescent dopant material and Ir (ppy) 3, with an electronic transporting layer TPBi, followed by evaporation of the cathode material LiF / Al, can be obtained by the flexible green phosphorescent organic light emitting diodes. Next, using atomic layer deposition ALD thin film deposition method as encapsulated water-blocking film on device.In this study we used device structure: PEN / ITO PEDOT:PSS(55nm)/ WHT-215 (5nm) / TCTA: Ir (ppy) 3 (30nm, 15%) / TPBi (30nm) / LiF (1nm) / Al (100nm), green device of the current density 50 mA/cm2, the brightness of 2200 cd/m2, the current efficiency of 44 cd / A, power efficiency up to 23 lm / W .As packaging films deposited by atomic layer deposition system water blocking gas barrier, Package film structure [ZnO/Al2O3] 19, Measured by the amount of calcium test water Vapor Transmission Rate (WVTR): 5.2x10-3 g / m2 day .After a lifetime measuring instrument, in the initial brightness 1000cd/m2, measured after encapsulation to extend the life of 150 hours compared to the 37.5-fold increase in the die. By PECVD (plasma enhanced chemical vapor deposition) system deposited TiO2 film, changing the oxygen flow, plasma power, TiO2 films with different refractive indices can be obtained, the future can be applied to the OLED light extraction experiments.

並列關鍵字

Flexible organic light-emitting diodes ； Atomic layer deposition ； Thin film encapsulation ； WVTR ； TiO2

參考文獻

[11] 曾銘宏，陳冠綸，林龔樑，王慶鈞，蔡豐羽“ALD薄膜沉積技術”，工業材料雜誌，375 期，光電產業設備技術專欄，2014 年。

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國際替代計量

原子層沉積與薄膜封裝應用於可撓式有機發光二極體

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