本文成功發展兩套檢測系統,包括:五自由度靜態檢測系統與五軸工具機光學校正系統,檢測CNC五軸工具機之誤差。 五自由度靜態檢測系統是結合靜態光感測頭與雷射量測系統所構成。此系統可直接量測CNC五軸工具機之靜態誤差,透過規劃數值控制(Numerical Control ; NC)路徑可達到靜態2L+1R軸(X、Y、C軸)、靜態3L+1R軸(X、Y、Z、C軸)、靜態3L+2R軸(X、Y、Z、A、C軸)等五個自由度的誤差。 五軸工具機光學校正系統是結合單顆球透鏡、兩組雷射以及兩組光電式感測器所構成。此系統可量測CNC五軸工具機之靜態誤差,且可依照ISO所規定之NC路徑達到靜態BK1(Y、Z、A軸)、靜態BK2(X、Y、C軸)、靜態BK4(X、Y、Z、C、A軸)等誤差之量測,並且利用靜態BK1與BK2之路徑,可量測出機台之偏心誤差,並加以分析,藉由調整機台控制器之參數表來降低工具機誤差。 本文預計開發之量測系統需具備規格為:依工具機之各種規格,量測範圍可達工具機工作範圍。線性定位重複精度達±1μm(±3σ),線性定位系統不確定度達±3μm,角度定位重複精度達±1 arcsec(±3σ),角度定位系統不確定度達±3 arcsec。 關鍵詞:CNC五軸工具機,幾何誤差,線性軸,旋轉軸。
Computer numerical control (CNC) machine tool is widely applied on the machinery processing industry. In order to decrease the processing time and increase the accuracy of products, five-axis CNC machine tool gradually supplants three-axis CNC machine tool. Five-axis CNC machine tool is composed of three linear axes and two rotary axes, so it has the multi-directional manufacturing ability. Thus, the properties of its simulataneous multi-axis movement are focused. In this paper, two measurement systems for five-axis CNC machine tools are presented. One is a five-degree-of-freedom geometrical measurement system, (5-DOF GMS), and the other is an optical calibration system (OCS). The 5-DOF GMS is composed of a static-detector-head and a laser measurement device. Along the planning measurement path, 2L+1R, 3L+1R and 3L+2R, the five-degree-of-freedom error of the simultaneous multi-axis movement of five-axis machine tools can be obtained. The results of the experiment evidence that the linear and angular accuracies of the 5-DOFGMS achieve ±0.3 μm and ± 0.3 arcsec, respectively. The OCS is composed of two laser sources, two quadrant detectors and a ball lens. According to the planning measurement path of the ISO/CD 10791-6 which is a draft of International Standards Organization, the three-dimension error of the simulataneous multi-axis movement of five-axis machine tools can be obtained. The results of the experiment evidence that the eccentric of the rotary stage as the simulataneous multi-axis movement can be effectively compensated and the linear accuracy of the OCS achieve ±0.3 μm.