熱滾壓處理對ITO/PET結構性質之影響

The Influence of Thermorolling Treatments on Properties of ITO/PET Structures

鄭智源(Zhi-Yuan Zheng)

指導教授 ： 徐烱勛

國立虎尾科技大學/工程學院/動力機械工程系機械與機電工程碩士班/碩士(2016年)

摘要

構成軟性顯示器的主要元件為軟性基板與透明導電氧化物鍍層，目前以鍍製ITO導電薄膜之PET塑膠基板最具前瞻性，然ITO導電薄膜因為導電薄膜與基板的機械性質不同，使得製程或撓曲而造成導電薄膜與基板內部產生過大的殘留應力、介面接合強度降低且導電薄膜產生裂痕，故本論文透過高分子材料具有玻璃轉換溫度之特性(柔軟似膠)，將此特性以熱滾壓處理技術應用於ITO/PET膜片，同時搭配循環彎曲負載機構進行實驗，並量測ITO薄膜電阻特性、光學穿透率、薄膜變形量與薄膜殘留應力值以探討薄膜變化情形。
由實驗結果可得知熱滾壓處理技術對導電特性有極大效益， Case 1可使得ITO/PET 兩者接合更為緊密，促使ITO薄膜不易產生裂痕而造成片電阻值提升，Case 2可將ITO薄膜與PET基材重新接合，使得片電阻值下降；在光學穿透率部分可以發現試片經過熱滾壓處理或彎曲負載後會影響，但是沒有直接關係；並發現熱滾壓處理過後之試片再進行彎曲負載會使得薄膜殘留應力提升。

關鍵字

軟性顯示器 ； ITO ； 熱滾壓

並列摘要

The flexible substrate and transparent oxide layer are the fundamental structures within the flexible displays. Presently, the polyethylene terephthalate (PET) substrate deposited an indium tin oxide (ITO) layer is one of the best selections among them. However, there is a significant difference of mechanical properties between PET substrate and ITO layer, the considerable residual stress may be generated during the manufacturing process and large deflection be made in use, degrading the structural integrity to introduce the cracks. This thesis aims to perform the thermorolling treatments on ITO/PET structures to understand its influence on the electrical resistance, optical transmittance, warpage, and residual stress.

並列關鍵字

Flexible display ； ITO ； Thermorolling

參考文獻

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