高精度線性及旋轉平台技術開發

Development of a High Precision Technique for the Linear and Rotary Stage

張維中(Wei-Zhong Chang)

指導教授 ： 陳世欣

共同指導教授 ： 覺文郁

國立虎尾科技大學/工程學院/自動化工程研究所/碩士(2012年)

摘要

本論文在ROLL的加工設備主要建立兩項關鍵次系統：(1)高精度旋轉平台 (2) 高精度單軸線性平台。
高精度旋轉平台包含三個部分，第一個部分為利用無心旋轉馬達及壓電角定位補償平台所組成的旋轉平台系統，第二個部分為兩個壓電驅動器所組成的二自由度補償平台，第三個部分為環型光學尺及玻璃球量測系統(雷射光束搭配光電位移感測器以及球形透鏡所組成)量測旋轉軸誤差。可將無鐵心旋轉馬達在旋轉時所產生的誤差量回饋，並進行補償與控制。
高精度單軸線性平台包含三個部分，第一個部分為利用交流伺服馬達及單軸移動線性模組所組成的單軸線性移動平台，第二部分為利用壓電致動器推動之壓電定位補償平台。第三個部分為一組雷射干涉儀，量測平台移動時所產生的定位誤差，回饋誌控制器進行補償與控制。
以PID控制器進行壓電平台之控制及無鐵心旋轉馬達之控制，達到補償之效果。

關鍵字

壓電致動器 ； 單軸線性移動平台 ； PID控制 ； 光學量測 ； 角度定位

並列摘要

In the micro-nano fabrication technology, the working motions are classified as linear motion and rotary motion. Because the development of the latter mainly depends on multi-axis equipment and Roll to Roll (R2R) equipment, the positioning accuracy of rotating axis is very important in the precision machinery. At present, the main problems consist in positioning errors of rotating axis and measuring errors of roundout.
Therefore, aiming the above existing problems in this project of two system, the small angular errors by piezoelectric transducer (PZT) stage will be compensated in order to enhance positioning accuracy of rotating axis, and the optical rotary measurement system will be developed with the optical lever theorem and the half- reversal technique to reduce centering error of rotating axis. The subsystems will be developed in the, which include a high-precision rotary piezoelectric indexing table, a high-precision multi-DOF single-axis piezoelectric stage, an optical rotary measurement system with ball lens, and a multi-DOF laser interferometer feedback system.
In the second system, this paper presents the assembly of a nano PZT stage with interferometer feedback using multi PZT stage control system. This nano-stage integrates a single-axis long-stroke stage of linear displacement platform and a PZT stage by using piezoelectric actuator. The linear displacement platform can’t be controlled at high accuracy, thus, the Positioning error PZT stage is designed to compensate yaw errors in order to achieve the.

並列關鍵字

Piezoelectric actuator ； single-axis linear moving platform ； PID control ； optical measurement ； Angle position

參考文獻

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