高精度影像量測設備之二維精度補償方法

Two Dimensional Accuracy Compensation Method for High Precision Image Measurement Equipment

陳敬宗(Ching-Tsung Chen)

指導教授 ： 覺文郁

國立虎尾科技大學/工程學院/自動化工程系碩士班/碩士(2017年)

摘要

本文提出之高精度影像量測設備之二維精度補償方法，經由光學校正平板量測其二維精度之誤差，並進行誤差分析以得知其二維精度之補償值，並進行補償驗證之；本系統可供檢測及其補償之誤差項有：位置誤差、水平方向直線度誤差、直角度誤差。
目前二維尺寸精度，大多使用一維玻璃標準尺或是雷射干涉儀，其量測重點均在於單軸之幾何精度，二維精度的量測方式較為繁雜；本研究為二維影像測量設備提供一簡便快速低成本之誤差檢測及補償方法，透過二維光學校正平板進行量測，可改善其繁雜之量測系統架設，大幅降低人工校準的時間及人為操作所產生的誤差，且實驗結果表示其定位精度整體皆可提升至少60%以上。

關鍵字

CMM ； 座標量測機 ； 二維補償 ； 光學校正片

並列摘要

In this paper, the two-dimensional precision compensation method of high-precision image measurement equipment is proposed, and the error of two-dimensional precision is measured by calibration grid plate. The error analysis is carried out to obtain the compensation value of two-dimensional precision. The error terms that the system can detect and compensate includes position error, horizontal straightness error and squareness error.
The one-dimensional glass scale or laser interferometer is widely used in current two-dimensional, which focus on uniaxial geometric accuracy. Two-dimensional precision measurement method is more complicated; this study provides a simple, fast and low-cost error detection and compensation method. Complicated erecting system can be improved by means of two-dimensional calibration grid plate, greatly reduce the time of manual calibration and the error caused by man-made operation. The experimental result shows that the overall positioning accuracy can be raised at least 60% or more.

並列關鍵字

Calibration ； CMM ； compensation ； coordinate measuring machine

參考文獻

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