本論文研製一奈米級雷射直寫平台的控制器,包含建立平台模型以及設定線性馬達的順滑模態控制參數和壓電致動器PI控制的參數,並配合雷射干涉儀以進行平台回授控制。多數平台掃描的路徑並沒有考慮方向轉換時所產生的劇烈震動以及加速度曲線的平滑度。沒有考慮加速度曲線的平台在加速度劇烈變化時(轉角處)會造成震動,這震動會使誤差增加,所以路徑規劃是不可或缺的一個環節。本論文透過公式推導將路徑公式化,設定位移、速度和加速度的最大值,去計算所需的加速度時間和等速區時間以達到路徑最佳化。本論文亦透過實驗分析壓電致動器的回授訊號中有哪些額外的影響因數,並利用快速傅立葉轉換做頻譜分析有哪些增益較大的訊號,藉以設計濾波器將其過濾,以改進控制結果。
In this thesis, the control of a laser direct writing nano-stage is studied. For obtaining long-stroke and high precision, this stage is formed by a linear motor driven stage and a piezoelectric actuator driven stage. In this study, the linear motors are controlled by sliding-mode controller and the piezoelectric actuator is controlled by PID controller. When doing the scan motion, the dramatic change in acceleration will cause undesirable oscillation and increase the positioning error. Therefore, the path planning is an important issue for motion control. In this study, an quadratic curve is used to define the acceleration curve of the movement. Based on this acceleration curve, a smooth path of the movement can be derived. Finally, the control results of the new controllers with new planed path are compared with the results that controlled by previous designed controller. Experimental results are proposed to demonstrate the performance of the new controller.