矽基微柱狀透鏡於光耦合之研究

本論文的目的在研究以矽為基板之微柱狀透鏡來提高光學元件間之耦合效率(Coupling Efficiency)，利用在微型光學平台(Micro-Optical Bench，MOB)上，結合半導體製程技術可在矽基板上製作，精確將各元件定位，降低封裝上的誤差。本文所設計出之矽基微柱狀透鏡具有一個維度聚焦能力，將其應用在工作距離約100~200μm之雷射二極體-光纖耦合上。而且利用半導體製程，直接在矽基板上成長蝕刻出透鏡輪廓，具有微小化，低成本且高量產可能性等優點。模擬之光耦合效率在工作距離約100~200μm及不考慮反射損耗(Fresnel Loss)下，約20～40 %，並對元件的製作與系統之量測皆有提出完整的說明及討論。

關鍵字

耦合效率；透鏡；矽基板；微型光學平台

並列摘要

The monolithic micro-cylindrical si lens is proposed for increasing the coupling efficiency between Laser Diode and Single Mode Fiber. Although the cylindrical lens only has one-dimensional focusing ability, the coupling efficiency of 20~40% is still designed in the short working distance of 100~200 μm. By using the micro-optical-bench (MOB) technology, the optical elements can be precisely aligned on the chip. The profile is properly defined by the mask, and is fabricated by deep dry etching. In addition, the strong Fresnel loss is improved by the anti-reflection coating of SiO2 film. The measurement results show the highly consistence of the designed structure. In summary, this proposed coupler module posses the characteristics of minimized, low cost and high mass production possibility.

並列關鍵字

coupling efficiency ； Silicon-based ； lens ； micro-optical-bench

參考文獻

1. L. Y. Lin, J. L. Shen, S. S. Lee, and M. C. Wu, “Realization of Novel Monolithic Free-Space Optical Disk Pickup Heads by Surface Micromachining," Opt. Lett., 21(2), p. 155-157, 1996.

2. J. Y. Chang, C. M. Wang, C. C. Lee, H. F. Shih, and M. L. Wu, “Realization of Free Space Optical Pickup Head with Stacked Si-Based Phase Element,＂IEEE Photonics Technology Letters, vol. 17, pp. 214-216 , Jan. 2005. SCI/EI

3. Jun-ichi Shimada, Osamu Ohguchi, and Renshi Sawada, ”Microlens Fabricated by the Planar Process,” J. Lightwave Technology, 9, 571-576(1991)

4. Virendra N. Mahajan, Optics imaging and aberrations, SPIE Optical Engineering Press(1998)

9. B. E. A. Saleh, and M. C. Teich, Fundamentals of Photonics, John Wiley (1991).

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矽基微柱狀透鏡於光耦合之研究

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