應用於RF前端電路之可重置技術

本論文乃針對兩種射頻前端電路之可重置機制進行討論與設計，包含CMOS-MEMS 制動及液態金屬制動。液態金屬具有低驅動電壓及高可塑性之優勢，因此第二章探討以液態金屬製作之RF開關，利用PDMS設計微通道於PCB板上，再給予外部偏壓致動其液態金屬達到ON狀態，其中操作頻率為2.4 GHz，而ON狀態下植入損耗與反射損耗分別為3.7 dB與10.8 dB，OFF狀態下隔離度為24.3 dB。CMOS-MEMS 則在於使用標準製程製作, 因此易整合於CMOS IC電路之中。本論文使用TSMC 0.18 um微機電製程實現兩顆電路，以外部偏壓開關靜電式魚骨架構改變指叉間距，進而改變指叉電容值而達到電路可重置之目的。第三章為V-Band微機電壓控震盪器，採用已實現壓控震盪器架構，再將本團隊設計之微機電指叉式電容置於LC tank之中，運用微機電電容之高Q值以及高線性度之特點以期達到較大的頻率調控範圍與改善相位雜訊，其模擬頻率為53.58至56.14 GHz，輸出功率大於-8.8 dBm，相位雜訊為97.2 dBc/Hz於1 MHz offset。第四章則是利用主動式類循環器設計之反射式相移器，將微機電架構置於主動循環器當中作為反射式負載，其操作頻率為24 GHz，後端設計一Buffer降低植入損耗，而微機電負載切換狀態達到九組，相位可調範圍為73，晶片面積2.04 mm^2

關鍵字

可重置電路；液態金屬

並列摘要

This thesis focuses on the reconfigurable mechanisms for RF front-end circuitry, including CMOS-MEMS actuation and liquid metal actuation. Liquid metal has the advantage of low driving voltage and high deformability. Chapter-Two therefore designed a 2.4-GHz RF switch driven by liquid metal. The microchannels are constructed on the PCB using PDMS, wherein the liquid metal is deformed to connect two ports when the DC biasd is applied, resulting in ON state. The measurement results show that the insertion loss and reflection loss are 3.7 dB and 10.8 dB in ON state, respectively, while the isolation is 24.3 dB in OFF state. CMOS-MEMS components can be easily integrated with other CMOS ICs since they are fabricated using standard process. In this work, we use TSMC 0.18-um CMOS process to design two MEMS-driven circuits. The interdigitated capacitance can be varied due to the change of finger spacing, which is driven by fish-bone actuator. In Chapter-Three, a V-Band voltage-controlled oscillator architecture has been designed. The MEMS-driven high-Q interdigitated capacitor is placed within the LC tank to achieve larger frequency tuning range and frequency with better phase noise, The simulations show that the analog frequency of 53 GHz, the output power is greater than -8.8 dBm, phase noise of 97.2 dBc / Hz at 1 MHz offset. Chapter-Four contains a tunable reflection-type phase shifter, where the MEMS-driven interdigitated capacitor is connected to an active circulator as reflective loads. The operating frequency of 24 GHz, a back-end design reduces implantation loss Buffer , while the micro-electromechanical load switching status to nine group phase adjustable from 73, 2.04 mm ^ 2 die area

並列關鍵字

Liquid Metal ； MEMS ； Reconfigurable Circuits

參考文獻

[7] The CIC CMOS MEMS design platform for heterogeneous integration, Chip Implementation Center, CIC, Taiwan, Document no. CIC-CID-RD-08-01, 2008.

[2] 蔡旻輯，利用CMOS-MEMS製程設計之微波關鍵電路，碩士論文，電機工程，國立中正大學，民國102年。

[4] 黃嘉宏，台灣CMOS微機電產業發展機會，碩士論文，管理學院，國立交通大學，民國99年

[27] D. J. Huang, J. L. Kuo and H. Wang, "A 24-GHz low power and high isolation active quasi-circulator," Microwave Symposium Digest (MTT), 2012 IEEE MTT-S International, Montreal, QC, Canada, 2012, pp. 1-3.

[6] M.R. Khan, C.B. Eaker, E.F. Bowden and M.D. Dickey, “Giant and switchable surface activity of liquid metal via surface oxidation,” PNAS, vol. 111, no. 39,pp. 14047-14051, Sept. 2014.

國際替代計量

應用於RF前端電路之可重置技術

未授權

主題瀏覽