新式微型霧化器的有限元素模擬與分析

本研究主要是以有限元素法針對一新式設計的微型霧化器進行模態分析。本微型霧化器組成可分為壓電致動器、液體腔與磁性噴孔片，因微型霧化器之工作頻率需在共振頻率上才能有較佳的霧化效果，因此需進行模態分析以取得系統的共振頻率。但本微型霧化器屬於一種複雜的流固耦合系統，所以本研究針對此一特殊系統設計建立其有限元素模型，此一建模觀念經由與文獻結果的比較可證明其適用性。又本微型霧化器的設計特點之一為具有可變形之磁性噴孔片，當其受磁力作用而變形時，共振頻率也會相對產生改變，故需同時考慮有預應力作用於噴孔片時之模態分析，以了解噴孔片變形前後對共振頻率之影響。最後由分析的結果得到本微型霧化器系統的兩組共振模態解，且探討了噴孔片變化量對共振頻率的影響及本微型霧化器的最佳操作方式。

關鍵字

微型霧化器；有限元素分析；模態分析；流固耦合；磁性噴孔片

並列摘要

The modal analysis based on finite element method for a new type of micro-atomizer is performed in this research . The micro-atomizer composes mainly of a PZT bimorph actuator, a fluid reservoir and a magnetic nozzle plate. In order to get better atomizing result, the operating frequency of the atomizer has to be set as close as possible to the system resonant frequency, which can be obtained by a modal analysis. However, the present atomizer is a complicate fluid-structure coupling system, therefore this research develops a finite element modeling concept to establish the finite element modal to perform the modal analysis for the atomizer system, and the applicability of this modeling concept had been verified by the comparison with the result of the existing literature. Moreover, and of the key features of the atomizer design is the deformable magnetic nozzle plate, which will deform when subject to a magnetic force, and hence the system resonant frequency will also change. To investigate the deformation effect of the nozzle plate to the system resonant frequency, a prestressed modal analysis is also considered. By these modal analysis two basic resonant vibration modes as well as their corresponding frequencies are numerically solved, a discussion about the deformation effect of the nozzle plate to the resonant frequency and the best operating mode of the atomizer is also given

並列關鍵字

Micro-atomizer ； Finite element analysis ； Modal analysis ； Fluid-solid coupling ； Magnetic nozzle plate

參考文獻

Yao D., Kim B., 2002, “Simulation of the filling process in micro channel for polymeric materials,” Journal of micromechanics and microengineering, 12, pp.604-610.

Yang K.S., Chen I.Y., Shew B.Y., Wang C.C., 2004, “Investigation of the flow characteristics within a micronozzle and diffuse,” Journal of micromechanics and microengineering, 14, pp.26-31.

Chen C.C., Lin C.C., “An impedance approach forvibration response synthesis using multiple PZT actuators,” Sensors and Actuators A 118, pp.116-126, 2005.

Jeng Y.R., Tu P.Y., Feng G.H., Su C.C. and Peng Y.Y., 2007, “PZT bimorph actuated atomizer based on higher order harmonic resonance and reduced operating pressure,” Sensors and Actuators A 136, pp.434–440.

Feng Y., Zhou Z., Zhu J., Du G., 2007, “The effect of nozzle layout on droplet ejection of a piezo-electrizally actuated micro-atomizer,” ACTA Mechanica Sinica, Vol.23, pp.163-172.

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新式微型霧化器的有限元素模擬與分析

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