- 學位論文
THC測定濃度在連續自動監測系統和操作系統之差異探討
Estimation difference of THC determination between the continuous emission monitoring system and the operation system
摘要
光電產業對於揮發性有機物(Volatile Organic Compounds, VOCs) 之處理主要有冷凝、吸收、吸附、生物處理及焚化等方式。為能隨時掌握VOCs之處理效率，常設置THC(Total Hydrocarbons,簡稱THC)連續自動監測系統，除可掌握設備處理VOCs之效率外，亦可供末端設備之性能是否有再提升或改善評估之參考。本研究針對光電產業公司以THC連續自動監測系統之校正管路配置差異進行分析，並針對沸石轉輪於處理VOCs成效上，進行相關濃度及去除效率檢測及數據分析。研究結果顯示；THC連續自動監測系統之儀器端管路，以零點(0 ppm)氣體查核後測得Inlet端濃度值為23.68 ppm，確認其數值已產生偏移；經執行零點校正後可恢復至0 ppm；再以標準氣體進行系統端管路查核比對得知，Inlet端濃度仍有2.09 ppm，Outlet端濃度有2.86 ppm之差異；經校正後其值可恢復至0 ppm。管末沸石轉輪處理前VOCs之濃度值為655 ppm，轉輪後VOCs之濃度降為42 ppm，沸石轉輪對VOCs之去除率可達93 %以上。VOCs於沸石轉輪吸附濃縮後，再經蓄熱式焚化爐燃燒、處理後，VOCs可降至34 ~ 40 ppm，整個處理系統對VOCs總去除率可達95%以上。本研究結果顯示：以系統端管路進行標準氣體校正，更能有效偵測廢氣VOCs濃度；且沸石轉輪能有效地去除光電產業排放之VOCs，若沸石轉輪再輔以蓄熱式焚化爐處理，可進一步降低VOCs排放；本研究結果未來可供相關業者處理排氣VOCs之參考。
並列摘要
The main treatment methods for the Volatile Organic Compounds (VOCs) in the High-Tech industries are the related equipments of condensation, absorption, adsorption, bio treatment and incineration, and so on. In order to control the VOCs elimination efficiency after treatment at any time, we must set up the continuous monitoring system, the system not only control the VOCs elimination efficiency, but also promote and improve the performance of the end side of the equipment for estimation. The study is mainly to analyze the difference of the gas calibration duct configuration by THC continuous monitoring system in optoelectronic industries and to explain the figure of the VOCs elimination efficiency by testing with zeolite rotor system.The analysis results show that the value of the Inlet side is 23.68 ppm by 0 ppm gas calibration with the THC continuous monitoring system, it confirms that the value has an error, after executing zero point calibration, the value returns to 0 ppm, then by comparing with the system side duct after using standard gas we know, the concentration of the Inlet side still has 2.09 ppm, the Outlet side has 2.86 ppm in difference, after calibration, the values return to 0 ppm, the monitoring system keeps in stable status. The figure of the efficiency of VOCs elimination by zeolite rotor system shows that the concentration of the VOCs is 655 ppm before treatment, but the value is large down to 42 ppm after treatment, its elimination rate is 93.6 %.From the above two experiments we know, it will has more efficient to detect VOCs actual concentration by executing standard gas calibration in system side duct. The figure of the efficiency of VOCs elimination by zeolite rotor system shows that the method has its quite efficiency. If the treatment cooperates with the incineration equipment, the efficiency of VOCs elimination will be better.We hope the results of the study can offer the related industries for reference.