整合電腦輔助分析及最佳化方法於微細元件之設計與製作

DESIGN AND FABRICATION OF MICRO-DEVICES BY INTEGRATING COMPUTER-AIDED ANALYSIS AND OPTIMIZATION METHOD

詹至剛(Chi-Kang Chan)

指導教授 ： 鄭金祥 ； 賴光哲

大同大學/工程學院/機械工程學系所/博士(2008年)

摘要

本論文之目的為發展一整合電腦輔助分析及最佳化搜尋之方法、並應用於微細元件如毫米尺度加熱器流道及電熱式微致動器之分析、設計、製作及效能最佳化等問題。
最佳化之架構係以簡化型共軛梯度法(Simplified Conjugate Gradient Method)作為最佳化搜尋之方法，再利用有限元素分析軟體ANSYS作為格點產生器及正向解之計算處理工具，並發展出一介面成功整合格點產生、正向解計算、及最佳化搜尋等最佳化設計步驟。
在毫米尺度加熱器流道應用方面，研究中分別針對二維及三維之流道進行探討，決定最適合之形狀函數(Shape Function)及運用再分配法(Redistribution Method)等，以提出二維及三維流道之最佳化設計結果，藉由設計流道壁面形狀達到增進流道熱傳效能及降低管內壓力降之目標。
在微致動器應用方面，首先針對微致動器原型作設計分析，之後以半導體製程加工製作並對實際元件作效能測試。接著，針對原型設計之缺點進行改良，藉由不同材料之配置設計來穩定及改善微致動器之效能。最後，再針對改良型之微致動器進行最佳化設計，以得到一最佳致動效能之微致動器。

關鍵字

最佳化設計 ； 毫米尺度流道 ； 微致動器 ； 微機電 ； 簡化型共軛梯度法

並列摘要

The aim of this thesis is to develop an approach that integrating computer-aided analysis and optimization method, and then apply the approach to design and optimize millimeter or micrometer-scale devices, including the millimeter-scale air heating channel and the electro-thermal microactuator. The optimization framework consists of a grid generator, a direct solver, and numerical optimizer. Herein, the Simplified Conjugate-Gradient Method (SCGM) is employed to build the optimizer and the general-purpose finite element code ANSYS is used to be the grid generator and direct solver. Among them, an interface program that integrating the optimizer and ANSYS is developed.
In application of the approach to the optimization of the millimeter-scale air heating channel, two-dimensional and three-dimensional channels are investigated. The proper shape function is determined and the redistribution method is employed to construct the irregular wall shape profiles. Optimization for the wall shape profile of a millimeter-scale air-heating channel has been performed to enhance the heat transfer and reduce the pressure drop.
In application of the approach to the optimization of the electro-thermal microactuator, the conventional design is analyzed and fabricated. Meanwhile, the performance test is investigated. To improve the performance, the modifications of the conventional design are attempted and the superior one is selected to be optimized. Finally, optimization of microactuator for obtaining a large bending displacement with a low temperature has been performed.

並列關鍵字

Millimeter-scale channel ； Microactuator ； MEMS ； Optimization ； SCGM

參考文獻

[2] G.Jr. Stolz, Numerical Solutions to an Inverse Problem of Heat Conduction for Simple Shape, J. Heat Transfer, 82 (1960) 20-26.

[3] C.H. Huang, C.W. Chen, A Boundary-Element-Based Inverse Problem of Estimating Boundary Conditions in an Irregular Domain with Statistical Analysis, Numerical Heat Transfer, Part B, 33 (1998) 251-268.

[4] M. Prud’homme, T.H. Nguyen, On the Iterative Regularization of Inverse Heat Conduction Problems by Conjugate Gradient Method, Int. Comm. Heat Mass Transfer, 25 (1998) 999-1008.

[5] C.H. Huang, S.P. Wang, A Three-Dimensional Inverse Heat Conduction Problem in Estimating Surface Heat Flux by Conjugate Gradient Method, Int. J. Heat Mass Transfer, 42 (1999) 3387-3403.

[6] H.M. Park, O.Y. Chung, An Inverse Natural Convection Problem of Estimating the Strength of a Heat Source, Int. J. Heat Mass Transfer, 42 (1999) 4259-4273.