溶膠凝膠法製備VO2薄膜摻奈米銀粒子其特性之研究

The Study of Properties of VO2 Thin Film with Nano Silver by Sol-gel Technique

葉劭恩(Shau-en Yeh)

指導教授 ： 胡毅

大同大學/工程學院/材料工程學系所/碩士(2011年)

摘要

二氧化釩(VO2)為一種具有金屬-絕緣體特性轉換的材料，從室溫至68℃，將從原先的半導體態轉變成導體態，並有著電性與光學性質的變化，因此此種材料常被應用於智慧窗玻璃與熱敏元件等。
利用混合奈米銀粒子，可將其電性提升數十倍，且不影響其穿透率仍為透明薄膜，而得到更能應用於日常生活中的窗玻璃。
本實驗利用溶膠凝膠(Sol-gel)方法製備奈米銀粒子與VO2薄膜，經由XRD分析相變，XPS分析其組成，SEM觀察其表面形貌，與電性的檢測和穿透率量測，來觀察在不同燒結溫度和不同混合銀粒子濃度下，對二氧化釩其相變化特性的改變。

關鍵字

奈米銀 ； 熱敏電阻 ； 溶膠凝膠法 ； 二氧化釩

並列摘要

Vanadium dioxide has a property of Metal-insulator Transition. In the room temperature to 68℃, the VO2 undergoes phase transition, accompanied by drastic changes in electric and optical properties. It may used to Smart Windows and thermal element, and etc.
By mixing nano-silver particles into VO2 thin film, the electric property great than unmixed ten times. And the transmission of thin film still was, that can be more useful in our life.
In this study the nano-silver particles and the VO2 thin film was form by sol-gel method. The film was scanned by X-ray diffraction in which to confirm the phase. X-ray photoelectron spectroscopy can provide further information on composition. Scanning electron microscopy image illustrates the morphology of surface. We observed the electron property and transmission change to analyzed the property transform in different sintering temperature and concentration of nano-silver particles.

並列關鍵字

Vanadium dioxide ； nano-silver ； Metal-insulator Transition ； sol-gel method

參考文獻

[26] Ki Do Kima, Dae Nam Han, Hee Taik Kim, Chemical Engineering Journal ,104, 55–61,(2004)

[3] P. B. Fabritchnyi et al., Solid State Communication. 74, 337 (1990).

[13] W. Haidinger and D. Gross, ThinSolid Film, 12, 433,(1972).

[18] C. B. Greenberg, Thin Solid Films, 110, 73-82, (1983)

[20] T. Maruyama, and Y. Ikuta, J. Mater., Sci. 28, 5073-5078 (1993)