304不銹鋼利用陰極電弧沉積Ti-C-O及Cr-C-O之微結構與特性研究

Study on microstructure and characteristics of arc-deposited Ti-C-O and Cr-C-O on 304 stainless steel

李俊穎(Chun-ying Lee)

指導教授 ： 許正勳

大同大學/工程學院/材料工程學系所/博士(2012年)

摘要

本研究將Ti靶及Cr靶各通入CO2反應氣體，並利用陰極電弧沉積(cathodic arc deposition)系統分別沉積Ti-C-O 及 Cr-C-O薄膜於AISI 304不銹鋼基材上，在Ti-C-O膜層的主要鍍膜參數為控制CO2氣體的工作壓力，而Cr-C-O 膜層則是改變基材偏壓及CO2氣體流量；鍍膜型態及結構利用XRD、SEM、TEM等進行確認，膜層的特性分析則包括硬度、磨耗性、附著性及耐濕式沖蝕性實驗，並與基材在同樣實驗條件下比較表面改質前後各特性之差異。
由實驗結果顯示，與其他工作壓力條件相較之下，當通入CO2氣體在工作壓力5mtorr時，Ti-C-O膜層中能獲得TiC及DLC混合相的結構，此膜層具有最佳附著力(HF1)，最低的表面粗糙鍍(Ra: 0.17μm)，以及最高的硬度(18 GPa)；而Cr-C-O膜層沉積方面，在40sccm-150V條件下合成之Cr-C-O膜層，則有最佳附著性(HF1)及最高H/E值，與AISI 304不銹鋼基材相比，在耐磨耗及沖蝕性皆具有改善之效果。

關鍵字

耐磨耗 ； 陰極電弧沉積 ； 304不銹鋼 ； Ti-C-O鍍膜 ； Cr-C-O鍍膜 ； 耐沖蝕

並列摘要

In this study, cathodic arc deposition system with CO2 reaction gas and the two targets of Ti and Cr metals was used to separately deposit Ti-C-O and Cr-C-O films on AISI 304 stainless steel substrates. The coating parameters were mainly to control working pressure of CO2 for Ti-C-O film while to change substrate bias and CO2 flow rate for Cr-C-O film. Coating morphology and structure were identified by XRD, SEM and TEM. And then the analysis of coating properties including hardness, abrasion, adhesion, and wet erosion tests were carried out for exploring the effect of Ti-C-O and Cr-C-O coatings on the surface behavior of AISI 304 stainless steel.
The experimental results showed that the use of CO2 working pressure of 5mtorr could obtain a mixed structure of TiC and DLC phases in Ti-C-O film. The optimal Ti-C-O film had the best adhesion (HF1), the lowest roughness (Ra: 0.17μm), and the highest hardness (18 GPa) as compared to the other conditions of CO2 working pressure. In the Cr-C-O film deposition, the condition of 40sccm-150V could synthesize the Cr-C-O film with the best adhesion (HF1) and high H/E value to improve wear resistance and erosion resistance of AISI 304 stainless steel.

並列關鍵字

Wear resistance ； Cathodic arc deposition ； AISI 304 stainless steel ； Ti-C-O film ； Cr-C-O film ； Erosion resistance

參考文獻

1.林昭宏，“偏壓參數對AISI 304不銹鋼電弧披覆TiAlCrN鍍膜特性之影響”，大同大學碩士論文，(2008)，pp.1-2

17. 賴奎良，“ADI利用陰極電弧電漿沉積髮披覆TiN/TiAlN之鍍膜特性及腐蝕行為研究”，大同大學碩士論文，(2005)，pp.23-25

23. 賴奎良，“ADI利用陰極電弧電漿沉積法披覆TiN/TiAlN之鍍膜特性及腐蝕行為研究”，大同大學碩士論文，(2005)，pp45。

22. Raymond L. Boxman, “ Handbook of vacuum arc science and Technology”, 1996, pp. 137-469.

31. Raymond L. Boxman, “ Handbook of vacuum arc science and Technology”, 1996, pp.137-469.