多自由度幾何誤差CCD量測系統的研製

A Possible Design of CCD Based Multi-Degree of Freedom Geometric Errors Measurement

彭志光(Chih-Kaung Peng) ； 章明(Ming Chang)

《中原學報》 24卷1期 (1996/01) Pp. 31-35

https://doi.org/10.6358/JCYU.199601.0031

摘要

本文旨在提供一種新的多自由度幾何誤差即時量測系統，主要應用在高精密量床及機床上之幾何誤差校正，包括X、Y兩個直線位移誤差校正以及俯仰角、滾動角、偏折角三個角位移誤差校正，其原理主要是利用二維電荷藕合裝置（CCD）配合傅氏相位偏移方法（Fourier Phase Shift Algorithm）取代傳統中利用四象位光電二極體定位，而可即時量取五個自由度幾何誤差的數據，以做為精密定位校正的依據，利用本系統所提出的硬體結構及FPS的方法，校正的精度在線位移上可達到1μm，在角位移上可達到0.5 arc sec。

關鍵字

多自由度量測系統 ； 電荷藕合裝置 ； 傅氏相位偏移法則

並列摘要

A new multi-degree of freedom measuring system (MDFM) for the geometric errors including horizontal straightness, vertical straightness, pitch, roll, and yaw simultaneous measurement on the moving axes of a high precision coordinate measuring machine has been developed. The measuring principle is based on the combination that a new positioning method in which charge coupled device (CCD) array is used as a positioning detector instead of quadrant photo diode and the Fourier phase shift algorithm is used to calculate the geometric errors in frequency domain. Experimental results show that the system accuracy of 1tm in the straightness error measurements and 0.5 arc sec in the angular error measurements can be achieved.

並列關鍵字

Multi-Degree of Freedom Measurement (MDFM) ； Charge Coupled Device (CCD) ； Fourier Phase Shift Algorithm