懸臂式氧化鋅薄膜感音器之製作與研究

The Study and Fabrication of Cantilever Beam ZnO Thin Film Acoustic Sensors

張忠誠(Chung-Cheng Chang) ； 蕭宏欣(Hung-Hsin Hsiao)

《中華民國振動與噪音工程學會論文集》 1995 (1995/06) Pp. 37-42

https://doi.org/10.30028/CSSVANNUAL.199506.0037

摘要

本實驗主要是研製氧化鋅薄膜感音器，其中包括感音器之設計，壓電薄膜的形成及感音器之測試等步驟，並對感音器之特性加以探討。本實驗是以電化學矽蝕刻截止技術，得到需要之矽基板懸臂式共振結構，若與方形薄膜比較，懸臂式結構外形易改變，應用上有較大之彈性，且不需從P-Substrate蝕刻，故蝕刻速率較快，製作感音器限制較小。配合ZnO沉積在懸臂上，可對聲波信號進行偵測，若加以適當電壓號，則可作聲波之發射。本實驗以SiO2/Ai/Si基板沉積需要之高品質氧化鋅薄膜，完成氧化鋅懸臂式感音、發射元件之製作。並採用交互校準法測試自製之感音器對信號之頻率響應。由於感音器是在矽基板上製作，因此可配合感測系統積體化之趨勢，同時在研究上有較大之發展空間。

並列摘要

The fabrication of cantilever beam ZnO thin film acoustic sensors includes the processes of sensor design, deposition of ZnO thin film, analysis and discussion of acoustic sensors, etc.. We used electrochemical etching-stop technology to get cantilever beam Si thin film resonant structure and use sputtering technology to deposite ZnO on the beam. Because shapes of cantilever beam are easier to be changed than square thin film. We have less confinement in the application of sensors. We can use beam with Zn deposition on as sensors to detect acoustic signals. If we applied correct bias, these sensors could also transmit acoustic signals. In this experiment, high quality ZnO thin film on SiO2/Al/Si substrate was deposited to fabricate cantilever beam ZnO thin film detection/transmission devices, the frequency response of self-made sensors to acoustic signals was also tested by reciprocity principle. Because acoustic sensors are fabricated on silicon substrate, the processes are matched with integratization of sensor system. So the research of cantilever beam ZnO thin film acoustic sensorsace potential to develop.