光子奈米噴流傳播模態於串聯微米介電圓盤之研究

本文主要研究當微米圓盤成線性排列時，引起的光子奈米噴流傳播現象，稱為光子奈米噴流傳播模態。由氮化矽和二氧化矽兩種串聯微米圓盤，分別用紅光(671nm)、綠光(532nm)以及藍光(405nm)三種不同波長的雷射照射。本研究可分成理論分析及實驗測量兩部份進行研究。在理論方面，我們使用時域有限差分法，分別對不同微盤直徑、不同微盤折射率、不同光波長以及不同環境折射率進行模擬，觀察光子奈米噴流傳播模態的行為，並計算其傳輸效率、散射以及反射損失。在實驗測量方面，可分為兩項，第一項為晶圓製程，使用台灣大學奈米機電系統研究中心進行製程加工處理，第二項為晶圓量測及分析，使用本實驗式設計的光子奈米噴流量測系統觀察微米圓盤所產生的光子噴流傳播現象，分別照射在直徑3.5μm、4.5μm以及8.5μm的微米圓盤上，再將光纖探針放置於串聯微米圓盤的後方，利用光纖探針將光導入光譜儀中，進而取得光譜數據，並且與模擬結果相互驗證，此研究結果有助於解決高科技產業中影像量測以及傳輸問題。

關鍵字

光子奈米噴流；微米圓盤；晶圓製程；傳播模態

並列摘要

This paper studies of nanojet induced modes from a chain of microdisks. We fabricated the SiO2 and Si3N4 microdisks at different di-ameter. The laser of wavelength 671 nm, 532 nm, and 405 nm is used to be a light source for dielectric microdisk. This research can be divided into two parts, the theoretical analysis and experimental measurements to study. In the theatrical, We have a method of finite-difference time-domain We use the different microdisk diamter, different microdisk index of refraction, Different wavelengths and Refraction in different en-vironments to simulate. In experiment, the dielectric microdisks are made by using semiconductor manufacturing technology. The measure-ment of photonic nanojet is performed with a high sensitivity optical mi-croscope system. The photonic nanojets are observed from the collected images for microdisks of 3.5 μm, 4.5 μm, and 8.5 μm diameters, then the fiber probe is placed in the rear tandem microdisk. The light would be indicate spectrometer by fiber probe to obtain the data, and mutual authentication with the simulation result. The study will help to solve the problems of nano-scale image measurement and transmission in high technology industry.

並列關鍵字

Photonic nanojet ； microdisk ； wafer

參考文獻

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光子奈米噴流傳播模態於串聯微米介電圓盤之研究

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