本研究針對真空鍍膜於刀工具上的應用,為增進刀工具的磨潤性,在不大幅增加成本及更動設備的前題下,利用過濾式電漿電弧系統及Ti-Si合金靶材製備TiSiN薄膜,並探討製程中改變陰極電流對於薄膜層的機械及磨潤性等相關特性之影響,利用掃描式電子顯微鏡(SEM)、原子力顯微鏡(AFM)、刮痕試驗儀(Scratch tester)以及磨耗試驗儀(Wear tester)、維克氏硬度機(Vickers hardness)等評估TiSiN薄膜的特性。實驗結果顯示:隨著陰極電流的增加,TiSiN薄膜中的Si含量也會隨之增加,膜層厚度、硬度等也會隨著陰極電流的增加而增加;而相較於未鍍膜之底材,利用過濾式電漿電弧系統製備薄膜,可以獲得較佳之磨潤性,當鍍膜條件及氣體環境維持在陰極電流110A、偏壓45V等條件時,配合30 sccm的氮氣流量,可獲得最佳的薄膜品質。
he cathode arc depositions of TiSiN coatings for tool application are investigated. A filtered cathode arc deposition system is employed to deposite TiSiN in N2 reacting atmosphere using a Ti-Si alloy as the arc source. The effects of cathode current on the tribological properties of TiSiN films are investigated. Their microstructures, surface morphology, scratch and wear properties are also characterized. With the increase of cathode current, the Si concentration in TiSiN increases. The microhardness and coating thickness also increases with increasing cathode. It is found that the tribological properties of coated tools are advantageous over the uncoated tools. The best tribological properties are obtained by TiSiN coatings deposited using 110A current, 45V bias with a 30 sccm flow rate of N2 gas.