工業技術、材料科學及加工技術的進步,而使得日常生活的產品朝著輕、薄、短、小的方向發展,而且兼具多項功能的產品也到處可見。微細孔的應用相當廣泛,從工業到食品業的噴嘴以及紡織業的的抽線眼模均可見微細孔的應用,由此可見微細孔加工技術的重要。本研究主要利用微放電加工方法來加工微細孔,在微放電加工中微細孔之最小直徑受到微電極工具尺寸的限制,而孔的深度不僅受到微電極工具長度的限制,也受到排屑問題的阻礙,故高深徑比之微細孔,特別是深徑比大於10之微細孔加工仍相當困難,故本研究將探討微電極所能達到最小直徑與最大長度,利用此微細電極工具探討所能加工之微細孔深度,為了提高加工深徑比,利用振動平台治具,改善排屑問題增加微細孔之深徑比,以達到高深徑比之微細孔放電加工的需求
Micro-holes are widely used in some industrial fields ,such as injection nozzle、fiber spinning and drawing die. Some manufacturing processes like mechanical drilling process、Laser machining and EDM are available to fabricate micro-holes . In these manufacturing methods, micro EDM is an excellent and popular technology for drilling high quality micro holes without any burrs. However, micro EDM meets a critical problem for high aspect ratio deep micro holes machining, especially the diameter less than 0.1mm and aspect ratio larger than 10. Due to the flushing and renew problem of deionized water, it is difficult to fabricate deep-micro holes. In order to flushing out the debris, the vibration flushing process used applied in this study to drill high aspect ratio micro holes more efficiency.