陶瓷玻璃細小三叉深孔測量方法之研究

Study of Small holes on Zerodur Triangular Measurement

劉增受(Dzen-Sor Liou)

指導教授 ： 許東亞

國立臺北科技大學/機電學院/製造科技研究所/碩士(2014年)

摘要

本論文主要探討陶磁玻璃細小深孔量測問題。首先利用三次元座標量床（CMM），自行設計微細球狀探針，配合目前三次元量測機所配備（Renishaw PH-9A）之觸發式電子測頭測量，評估其量測之可行性，並由測頭觸發時所需之探測力計算出探測桿(stem) 之變形量，推估其可量測之最小孔徑。此外本論文之量測對象陶瓷玻璃為透明材料，故選用非接觸式的工具顯微鏡量測法量取各孔徑之上、下孔緣座標值，藉由線性迴歸分析(Regression Analysis)法，推導出其三叉孔中心線之線性方程式，計算各相交孔中心線之夾角（θ），以及各相交孔中心線之相交點位置(座標值)，來評估該陶瓷玻璃材料細小三叉孔之加工品質。

關鍵字

三次元座標量床 ； CMM ； 微細球狀探針

並列摘要

This study focuses on high aspect-ratio triangular small holes measurement on Zerodur material. In this paper, to measure the geometry of the high-aspct-ratio small holes, a long small spherical stylus tips was designed and attached onto the CMM’s probing head. However, the experimental results show that the undesirable contact will affect the measurement significantly by conventional triggering system of CMM (Renishaw PH-9A).
In order to evaluate the quality of the small holes, in this study, the measuring optical scope was used to measure the triangular small holes with horizontal direction due to workpiece transparent property. Using measurement point data, the triangular small holes angle could be calculated easily by mathematic equation. However, the measurement uncertainty and accuracy by optical scope needs to be improved in the future.

並列關鍵字

Small holes ； Coordinate Measuring Machine (CMM) ； Spherical Probe

參考文獻

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參考文獻