新型微透鏡點膠成形技術開發及其與微機電製程技術之整合

The Development of a Novel Micro Dispensing Lenses Technology and Its Integration with MEMS Processes

蕭勝議(Sheng-Yi Hsiao)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/博士(2008年)

摘要

微型光學透鏡在微光學元件中扮演重要的角色，大量研究已經針對凸透鏡進行了相關的討論及技術開發。然而微透鏡研究多數仍侷限在光纖應用上，藉由開發不同形態的透鏡元件，將凸透鏡與其它種類透鏡組合應用，將有助於開發微透鏡元件更多樣化的應用性。在實際應用上，微尺寸透鏡元件在應用時需要精密的組裝定位，除了不便於使用之外，也可能因組裝誤差影響設計品質。本研究從二個方向上去克服透鏡應用上的挑戰，第一，本文成功提出多樣化的透鏡種類及材料，除了具有正屈光度(Diopter power)的凸透鏡之外，本研究亦進行新型微凹透鏡的研發，以提供更多樣化的光學透鏡元件；也因為採用了液態點膠技術，所以將可相容於各類可進行固化操作的液態材料，大量不同的材料皆可以支援此點膠整合技術。第二，在元件整合面，本研究從微透鏡切入，研究新型微透鏡，並利用微機電製程可製作出各式樣不同的厚框架結構，在各個不同的製程平台晶片上成功實現前述微透鏡點膠製作。此外，液態點膠具有在框架結構上自動定位成形的能力，免除了微透鏡應用上組裝定位的需求及其將導致的定位偏差。更進一步地，液態點膠技術屬常溫後製程操作，亦可輕易整合於由各種不同製程平台所製作出來的元件上，包括各樣的微感測器及微致動器，有助於實現微透鏡的系統化的整合應用。總結來說，在元件面看來，新式的微透鏡元件將有助於新應用的發展；而在技術應用方面看來，整合不同的製程平台技術，提供契機，使微透鏡在聚焦之外有更多樣化的應用可能性。

關鍵字

點膠透鏡 ； 製程整合 ； 微凹透鏡 ； 液態透鏡成形

並列摘要

Micro-lenses play important roles in MOEMS. Convex micro-lenses are widely studied, especially for applications in optical fiber related researches. Beside the optical coupling application, it seems that the micro-lenses application is limited. Moreover, the miniature lenses are difficult to handle. As a result, precise position control and assembly are needed. To provide better chance for micro-lenses, the main solution is to develop as many types of micro-optical components as possible so as to create more feasibility. Some problems are solved in this study. A novel concave microlens is proposed and hopefully might lead colleagues to solve the aberration produced by single lens. A simple dispensing technology is compatible with different liquid materials. Moreover, the technology is integrated with various MEMS processes. Thus, with various materials and various integrated platforms, the micro lens is going to find more possibilities. MEMS devices such as sensors, actuators are relatively well-developed comparing with micro lenses. Integrating dispensing lens technology with well-developed MEMS devices can make itself to perform more practical functionality.

並列關鍵字

dispensing lens ； liquid phase formed lens ； micro concave lens ； process integration

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