本論文主要利用商用軟體COMSOL數值模擬,模擬微波激發同軸慢波結構線性電漿源,目的是建立一大尺寸且電漿密度均勻的線性電漿源,並觀察同軸慢波結構激發微波電漿表面波的物理特性。同軸結構是由中心金屬導體、鐵氟龍、空氣以及石英玻璃構成,使用COMSOL數值模擬軟體,在電腦上設計腔體、輸入參數,進而模擬電漿形成。 本論文發現在氣壓150mTorr輸入瓦數2400瓦狀況下,在時間t=3×〖10〗^(-7)秒至時間t=1.05×〖10〗^(-5)秒之間,有一模態轉換的現象,其模態轉換的位置會隨時間變化,經過進一步觀察電場分佈、電漿密度分佈,電漿密度在模態轉換前後有差異,而因為電漿密度分布的關係造成電漿阻抗不匹配,微波能量反射,讓模態轉換的位置電場較強。除此之外,在氣壓150mTorr輸入瓦數1200瓦、2400瓦以及3600瓦條件下電漿密度均勻區域超過600mm,電漿密度4×〖10〗^17 m^(-3)以上,達到大尺寸且電漿密度均勻的要求。
In this study, we used the commercial software COMSOL numerical simulation, to simulate the microwave-excited linear plasma source coaxial slow - wave structure. Our purpose is to establish a large linear plasma source with uniform density, and observe the physical characteristics in coaxial slow - wave structure. Coaxial structure is composed of central metal conductor, Teflon, air and quartz. We used COMSOL numerical simulation software to design cavity, then simulate the plasma by setting parameters. From the simulation, we get two conclusions. (1) We observed the phenomenon of mode transition.(2) We have successfully developed a large and uniform plasma source.