半導體晶圓廠製造執行系統之介面改善

Interface Improvement of a Semiconductor Fab Manufacturing Execution System

焦聖齊(Sheng-Chi Chiao)

指導教授 ： 黃雪玲

國立清華大學/工學院/工業工程與工程管理學系/碩士(2013年)

https://doi.org/10.6843/NTHU.2013.00419

摘要

製造執行系統(簡稱MES) 是半導體產業提升競爭力的重要關鍵，然而目前的系統仍需人為作業操作。在現今很多半導體晶圓製造公司，是有很大的空間可以改善製造執行系統介面之處；目前存在的系統介面多為不規則的顯示內容、複雜的程序，不一致的設計，和不完整的資訊回饋，讓操作者容易操作錯誤、增加記憶負擔，增長作業時間，加大心理壓力等等負面因素。有鑒於此，透過本研究探討製造執行系統介面改善之重要性及其效益。 本研究藉由人機介面設計之觀點，探討半導體MES操作介面改善，研究中除蒐集目前業界之MES操作介面樣本外，並整理介面設計之相關文獻，同時從理論與實務兩方面著手進行開發改良後之MES操作介面；並付諸實行於個案公司。本研究之實驗共分為五個階段進行，第一階段分析問題，列出目前個案公司之MES介面工作流程、並記錄每項動作操作時間及正確率，以作為改善前後介面設計其績效之比較。第二階段系統規畫，針對個案公司MES介面進行缺點及優點分析及介面資訊呈現方式，以求在規劃新的介面時能改善其缺點並保留其優點。第三階段則依相關文獻；介面設計八大原則設計使用者介面，並利用Visual Basic 軟體達成。第四階段及第五階段為撰寫程式碼及驗證評估系統，驗證本研究實驗結果改善前後改善之操作時間與正確率其幅度均有顯著性之差異，獲得大幅改善。 本研究結果顯示，重新設計操作介面並運用黃金八大原則改善後，確實會對現場操作人員無論於操作時間與正確率上，均有明顯之助益。

關鍵字

製造執行系統 ； 操作介面 ； 黃金八大原則

並列摘要

Manufacturing Execution System (MES) is the key point for semiconductor industry to enhance their competiveness, however, current system still relies on manual operation. Nowadays, it still leaves large room for semiconductor wafer manufacturer to improve the interface of MES. The existing system interface contained many drawbacks including irregular display content, complicated procedure, inconsistent design, as well as incomplete information feedback, which would produce negative factors inclusive of the following issues: manual handling mistakes by operators easily, increase of memory size, prolonging of operation time, and rise of psychological pressure. Therefore, the purpose of this study was to improve the MES interface.

This study would improve the operation interface of MES for semiconductor from the perspective of human-machine interface design. In addition to gather current samples of MES operational interface used in the industry and arrangement of reference documents regarding interface design, the research also engages in developing revised MES operation interface considering both theory and practice, and eventually implement it in the case study of a company. The experiments were divided into 5 phases. Phase 1 was to analyze questions, list out current working procedures of MES interface for the case study, and record every time spent in the operation as well as the accuracy so as to provide performance comparison of interface design before and after the improvement. Phase 2 covered system planning, which proceeds analysis of advantage and disadvantage in current MES interface of case study as well as the way to present interface information, as aimed to improve the flaw and keep original merits while designing new interface. Phase 3 was to design user interface based on reference documents and 8 golden rules of interface design, as was achieved by software Visual Basic. Phase 4 and phase 5 were program coding and system verification in terms of time and accuracy.

Based on the results of this study, re-design of operational interface and exertion of 8 golden rules indeed had obvious benefits to the operators in the production no matter in the operation time or the accuracy.

並列關鍵字

Manufacturing Execution System ； Operational Interface ； 8 Golden Rules

參考文獻

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