氧化鋅奈米線指叉電極晶片進行鎳鈷電鍍液濃度之研究

Study on ZnO-nanowire interdigitated electrodes for electroplating Ni-Co solution

王惠東(Hui-Tung Wang)

指導教授 ： 張耀仁

中原大學/工學院/機械工程研究所/碩士(2016年)

https://doi.org/10.6840/cycu201600101

摘要

摘要
在本項研究實驗中，提出一種簡單且成本低廉的方法能將氧化鋅奈米線用MEMS製程選擇性的生長在所需的位置，將水熱法結合微影製程技術，利用正負光阻不同特性來達到lift off(掀離)的效果，便能有效達到選擇性生長的目的。使用印刷電路板（PCB）作為基板，利用微影製程的方法將 PCB 板上的銅蝕刻出指叉電極圖案，在將奈米線生長於指叉電極間隙。基於法拉第電磁感應定律，利用金屬指叉電極法，氧化鋅奈米線層可測得金屬特性。並且通過電流-電壓圖(I-V curve)的變化來達到檢測目的實驗結果。實驗結果表示，氧化鋅奈米線層於廣大範圍的金屬濃度具有可靠的固定能力，且能夠檢測出（0.16g/L~55ng/L）的金屬濃度範圍。實驗結果也證實，奈米線生長於指叉電極間隙比傳統指叉電極更加靈敏，可測出不同濃度 I-V 曲線圖的關係，在劑量為（1ul）時也能清楚的分辨出水中的金屬濃度。

關鍵字

氧化鋅奈米線 ； 指叉電極

並列摘要

Abstract
A simple and inexpensive approach to selectively synthesized the ZnO nanowires at the specific area is proposed in this study. By integrating the hydrothermal method with the photolithography process, both the positive and negative resists were used to control the growth of nanowires through lift-off concept. The printed circuit board (PCB) was adopted as the substrate. On PCB, the interdigitated electrodes (IDE) array was firstly fabricated by etching the copper foil. Two types of chips were compared: global growth of ZnO nanowires on the device and patterned ZnO nanowires between IDE. Based on the Faraday's law of induction, it is found that the ZnO nanowires have Faraday's law of induction to capture electroplating solution of Metal. The detection of immobilized proteins is related to the variation of the current–voltage (I–V) characteristic curve. The experimental results show that ZnO nanowires have reliable immobilization capability for a wide range of electroplating solution concentrations. In addition, the electroplating solution from（0.16 g/L to 55 ng/L）can be detected. The chip with patterned ZnO nanowires between IDE is more sensitive than that with global growth of ZnO nanowires, even for small volume of electroplating solution.

並列關鍵字

ZnO nanowires ； IDE

參考文獻

【1】 Bhagaban Behera, Sudhir Chandra，＂An innovative gas sensor incorporating ZnO–CuO nanoflakes in planar MEMS technology＂，Sensors and Actuators B: Chemical, In Press, Accepted Manuscript, Available online 30 January 2016，P2-P4

【2】 Hugo Nguyen, Chu Thi Quy, Nguyen Duc Hoa, Nguyen The Lam, Nguyen Van Duy, Vu Van Quang, Nguyen Van Hieu，＂Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors＂，Sensors and Actuators B: Chemical, Volume 193, 31 March 2014, Pages 888-894，P4-P5

參考文獻

【3】 R.M. Pemberton, T. Cox, R. Tuffin, I. Sage, G.A. Drago, N. Biddle, J. Griffiths, R. Pittson, G. Johnson, J. Xu, S.K. Jackson, G. Kenna, R. Luxton, J.P. Hart，＂Microfabricated glucose biosensor for culture welloperation＂，Biosensors and Bioelectronics, Volume 42, 15 April 2013, Pages 668-677，P5-P6

【4】 Necmettin Kilinc, Onur Cakmak, Arif Kosemen, Erhan Ermek, Sadullah Ozturk, Yusuf Yerli, Zafer Ziya Ozturk, Hakan Urey，＂Fabrication of 1D ZnO nanostructures on MEMS cantilever for VOC sensor application＂，Sensors and Actuators B: Chemical, Volume 202, 31 October 2014, Pages 357-364，P6-P19