複合式壓電馬達設計

Design of A Composite Ceramic Motor

彭焌瑋(Chun-Wei Peng)

指導教授 ： 丁鏞

中原大學/工學院/機械工程研究所/碩士(2017年)

https://doi.org/10.6840/cycu201700120

摘要

本論文的目標為研製一種具雙向推動功能之d14+d33複合式型壓電陶瓷馬達，並比較一般常使用d15與d14的壓電陶瓷馬達。與d14壓電馬達相比d14+d33有較大橫向及縱向位移輸出，與d15壓電元件相比，一般常使用的d15壓電陶瓷元件為了產生更大的輸出速度與力，必須沿著極化方向以增加其厚度，然而d14+d33壓電陶瓷容易藉由增加元件垂直於接觸面方向的長度來達到增加輸出的目的，並不須透過高電壓的極化與提升驅動電壓的方式，另也能藉由增加尺寸來降低其壓電元件的自然共振頻率。本論文使用壓電陶瓷材料為PZT-8，其具有較高的機械品質係數外，亦具有較大的位移量而適用於壓電致動器。利用Ansys有限元素模擬分析壓電陶瓷馬達定子之共振模態以及簡諧分析，並進行實驗測試後，經驗證兩者結果相近。另也探討其驅動方式以及運動軌跡。亦將馬達架設於平台與旋轉軸承上進行馬達功能測試。對d14+d33壓電致動元件輸入為±150V的電壓，並分別能產生1.66µm的縱向振幅以及1.85µm的橫向振幅。在將馬達架設於線性滑台以及旋轉軸承(轉子)上，可以得到最大線性速度與力分別約為44.4mm/s及3.52N，以及最大轉速與扭力分別約為89.661rpm及0.049Nm。

關鍵字

壓電陶瓷馬達 ； 複合式型壓電陶瓷馬達

並列摘要

A new type of piezoelectric ceramic motor using d14+d33 to generate face-shear deformation is developed. In particular, two-way operation to provide forward and backward linear motion as well as clockwise and counterclockwise rotary motion is completely designed. Compared to d14 piezoelectric motor, the composite d14 + d33 type has a larger horizontal and vertical displacement output. Because of the polarization direction and the driving electrode of the usually seen d15 ceramic motor, large input voltage needs to apply to preserve enough electric field while attempting to increase the deformation by increasing the thickness. Different from d15, increasing height will increase deformation but with no need of applying large input voltage to maintain the electric field, and reduce the resonance frequency. Because of the above advantage, structure of d14 +d33 piezoelectric motor would be ideally built with a nearly square shape. Mode shape and harmonic analysis by using ANSYS simulation are carried out to search for ideal deformation under certain resonance frequency. Both analytical and experimental results are in a good agreement. The driving signal and motion trajectory is also investigated. Ceramics PZT-8 is used to design piezoelectric actuator. For a single piece of the built sample actuator with ±150V applied voltage, it is able to generate vertical and transverse vibration amplitude of about 1.66µm and 1.85µm respectively. The stator integrated with a linear stage (the carriage) and rotary bearings (rotor) as well as employed with an appropriate signal, the maximum linear speed and force about 44.4mm/sec and 3.52N. A rotation speed and torque is measured about 89.661rpm and 0.049Nm respectively.

並列關鍵字

piezoelectric motor ； composite piezoelectric motor

參考文獻

[3] K. Uchino, “Piezoelectric Ultrasonic Motors: Overview,” Smart Materials and Structures, vol. 7, pp.273-285, 1998.

[9] M. Kurosawa and S. Ueda, “Hybrid transducer Type Ultrasonic Motor,” IEEE Trans. UFFC, 38-2, pp.89-92, 1991.

[10] A. Manabu, Y. Tomikawa, T. Takano, “Thin Rotary and Linear Ultrasonic Motors Using a Double-mode Piezoelectric Vibrator of The First Longitudinal and Second Bending Mode,” Jpn. J. Appl. Phys. Vol.31, pp.3073-3076, 1992.

[11] A. Manabu, Y. Tomikawa, T. Takano, “Ultrasonic Motors Using Longitudinal and Bending Multimode Vibrators with Mode Coupling by Externally Additional Asymmetry or Internal Nonlinearty,” Jpn. J. Appl. Phys. Vol. 31, pp.3077-3080, 1992.

[12] V. Snitka, D. Zukauskas, V. Mizariene, “Positioning to Nanometer Resolution with Ultrasonic Actuators,” The 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX, Vol. 1, Issue: 3, pp.25 - 29, June 1995.