以 PVDF 壓電薄膜製作力感測器之特性研究

本論文中提出聚偏氟乙烯 (PVDF) 材料，由於其良好的壓電和鐵電性質並在許多感測器中應用，低硬度，高靈敏度，柔韌性，和輕量。本篇論文，通過使用PVDF的一層三維感測器的設計和特性進行了研究。拉伸的過程是為了增加PVDF感測器的性能。為了搜索最佳條件進行不同的拉伸比和溫度測試。執行厚度和橫向的極化，以獲得X，Y和Z軸的獨立測量方向。壓電的幾個重要特性是由FTIR，XRD和PFM裝置來探討。從FRIT和XRD的結果來說，他表明了PVDF感測器具有良好的品質。PFM圖像顯示在厚度和橫向極化後區域的變化。頻率響應和所提出的輸入/輸出敏感度響應PVDF感測器進行項能評估測量。在其他沒有反應的方向上會產生雜訊，但相對於響應方向所測得的輸出而言他很小。在Z軸上量測到的輸出電壓比在X軸和Y軸上所量測到的還要大，這也是預期中且合理的。

關鍵字

PVDF ； 3軸（3D）感測器；拉伸過程；極化過程

並列摘要

Polyvinylidene fluoride (PVDF) materials have been proposed and utilized in many sensor applications due to its good piezoelectric and ferroelectric characteristics, low stiffness, high sensitivity, flexibility, and lightweight. In this thesis, design and characterization of a 3D sensor in one layer by use of PVDF is investigated. Stretching and poling processes are done to increase the performance of PVDF force sensor. Different stretching ratio and temperature are tested in order to search an optimal condition. Thickness and Lateral poling of PVDF are carried out to obtain independent measurement direction along the X, Y, and Z axis. Several important characteristics of piezoelectricity are investigated by means FTIR, XRD, and PFM. From the results of FTIR and XRD, it indicates the PVDF force sensor has good quality. The PFM image shows the domain change happened after polarization in the thickness and lateral polarization. Frequency response and input/output sensitivity response of the proposed PVDF sensor is measured for performance evaluation. Bias or noise occurs in other nonresponsive direction, which is small with respect to the measured output in the responsive direction. The output voltage measured in the Z axis is larger than those measured in the X and Y axis, which is expected and reasonable.

並列關鍵字

PVDF ； 3-axis (3D) sensor ； stretching process ； poling process

參考文獻

[52] Ma, L., Melkote, S. N., Morehouse, J. B., Castle, J. B., Fonda, J. W., & Johnson, M. A. (2012). Thin-film PVDF sensor-based monitoring of cutting forces in peripheral end milling. Journal of Dynamic Systems, Measurement, and Control, 134(5), 051014.

[2] Kawai, H. (1969). The piezoelectricity of poly (vinylidene fluoride). Japanese Journal of Applied Physics, 8(7), 975-976.

[3] Gregorio Jr, R., & Ueno, E. M. (1999). Effect of crystalline phase, orientation and temperature on the dielectric properties of poly (vinylidene fluoride)(PVDF). Journal of Materials Science, 34(18), 4489-4500.

[4] Xu, H., Shanthi, G., Bharti, V., Zhang, Q. M., & Ramotowski, T. (2000). Structural, conformational, and polarization changes of poly (vinylidene fluoride-trifluoroethylene) copolymer induced by high-energy electron irradiation. Macromolecules, 33(11), 4125-4131.

[5] Choi, S., & Jiang, Z. (2006). A novel wearable sensor device with conductive fabric and PVDF film for monitoring cardiorespiratory signals. Sensors and Actuators A: Physical, 128(2), 317-326.

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以 PVDF 壓電薄膜製作力感測器之特性研究

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