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  • 學位論文

行波線性壓電馬達研製

Study of a Traveling-wave Linear Pizeoelectric Motor

指導教授 : 丁鏞
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摘要


本論文研究是針對線性滑台傳動而設計的扁平口形側推短直樑行波傳動壓 電馬達,主要研究重點是在有限長度的櫛齒短直樑,合成穩定有效的行波振形 供滑台直接側推傳動。行波樑採阻尼式半啞鈴ㄇ型櫛齒樑功能結構設計,以雙 駐波源壓電行波元件驅振,由剛接底樑長度延伸匹配滿足雙駐源尺寸共振模態, 並用高阻抗阻尼截面比的端邊樑柱設計做行波阻尼衰減以抑制端面反射干擾, 在櫛齒工作樑面上合成穩定有效行波振形模態,在自適配壓架固下以不斷前進 的浪型波峰端點接觸滑台側邊摩擦滑條,以波峰端點質點橢圓運動直接側推摩 擦傳動滑台做線性位移運動。本研究採用行波短直樑直接側推滑台傳動方式, 滑台具有無慣性誤差瞬時啓動與止動、強止剎鎖固力,並可有效降低磨擦材衝 擊磨損與破壞以提升操作穩定度。 利用有限元素模擬分析ANSYS 軟體獲得模態分析及簡諧分析結果,其共振 頻率與實驗值誤差。以電壓±150V 驅動線性滑台可獲得最大速度達40 mm/s,並 可由調變雙共振電源之電相差180 度做反向驅動控制。

並列摘要


In this article, a traveling-wave motor is designed to drive the stage. Motor is employed on the side of the stage. The primary task is to design a piezoelectric motor that can generate steady traveling wave for linear motion. The motor is constructed with semi-tooth comb beam dumbbell structure. Two sets of piezoelectric ceramics are laid in a line driven with same amplitude but different phase individually. To employ the suitable driving frequency matching with the desired mode shape, two standing waves are generated to form traveling wave. Using high impedance damper employed at the end of beam in order to suppress the reflecting wave. Appropriate vibration mode shape of the tooth comb beam is chosen that would create the desired structure deformation. Particles of the traveling wave will follow elliptical motion that is able to drive the mounted slider to move. The designed linear motor is of no inertia error, thus can instantaneously start and stop. Also, it has strong brake locking force, and can effectively reduce the weariness and damage of friction material to improve steady operation. Modal and harmonic analysis are carried out by using ANSYS. The resonance frequency and vibration amplitude between the analytical and experimental results are in a good agreement. While applying voltage of ± 150V, maximum output speed about 40mm/s is obtained. Adjustment of driving signals with phase difference of 180 degrees, reverse motion is achieved.

參考文獻


聲電機技術與應用” 科學出版社 北京2007。
Traveling Surface Acoustic Wave” 2009 IEEE International
[23] Markus G. Bauer, Thomas A. Dow “DESIGN OF A LINEAR HIGH PRECISION
[1] T. Sashida, and T. Kenjo, “An Introduction to Ultrasonic Motors,”
[2] KENJI UCHINO ,“PIEZOELECTRIC ACTUATORS AND ULTRASONIC MOTORS ”

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