微磁場計之模擬與分析

Modeling and Analyzation of Micromachined Magnetic Field Sensors

曾緣雄(Tseng-Yuan Hsiung)

指導教授 ： 周煥銘

崑山科技大學/工程學院/機械工程研究所/碩士(2008年)

摘要

本篇論文設計了一種根據電容變化而進行量測磁場大小的微磁場計，並使用專業軟件（CoventorWare）對該設計進行模擬與分析。通過對不同長度和形狀支架結構的模型的模擬，對比分析了影響該微磁場計的靈敏度的因素。
此元件的主要採用的基本架構是由四個支架支起的樑。當通以電流時，在磁場中的樑會由於受到洛侖茲力而發生變形，進而引起上下兩極板電容變化，因此可以通過對電容變化的量測而推測出磁場大小。
本篇論文通過改變支架的長度和形狀來比較各種結構的靈敏度：不同長度直線型支架設計、相同長度不同形狀支架設計、不同長度折線型支架設計。對比發現，無論對於直線型還是折線型支架的設計，支架長度越長元件的靈敏度越高；相同長度折線型支架的設計要比直線型支架的結構靈敏度高。

關鍵字

微磁場計 ； 磁場感測器 ； 電容 ； 靈敏度

並列摘要

This thesis introduces a micromachined magnetic field sensor based on calculating the change of capacitances and describes the ways to analyze the model using CoventorWare. In addition, analyses of different structures are carried out to compare and conclude the factors which play an important rule on the sensitivities of the micromachined magnetic field sensor.
The main structure of CoventorWare model is a beam, supporting by four brackets. Placed in the magnetic field, the beam would bend when applying current on it, therefore, leads to the change of capacities.
The key factors discussed in this thesis are the shapes and the lengths of the brackets, which cause the variation of device capacitance sensitivity. By various simulations and comparisions, we reach the conclusion that the longer the brackets are, the more sensitivity the modal can reach. Another result is that the zigzag-shape-bracket modal can lead to higher sensitivity comparing to straight-bracket-modal of the same length.

並列關鍵字

micromachined magnetic field sensor ； CoventorWare ； capacitance sensitivity

參考文獻

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